{"title":"用于生物医学应用的源电掺杂 TFET 生物传感器双材料控制栅极腔性能分析","authors":"Dharmender , Kaushal Kumar Nigam , Piyush Yadav , Vinay Anand Tikkiwal","doi":"10.1016/j.micrna.2024.207844","DOIUrl":null,"url":null,"abstract":"<div><p>The fabrication complexity, low sensitivity, detection speed, and costs associated with nanoscale devices have been significant concerns in the development of label-free biosensors. To address these issues, we report a novel dual material control gate cavity on source electrically doped tunnel field-effect transistor (DM-CG-CS-ED-TFET) for label-free biosensors. In this regard, the <em>n</em><sup>+</sup> drain and <em>p</em><sup>+</sup> source regions within the proposed device are induced by applying polarity gate (PG) bias voltages of PG-1 = +1.2 V and PG-2 = −1.2 V, respectively, across the respective polarity gate electrodes. This approach not only overcomes doping control issues but also avoids thermal budget constraints and minimizes fabrication complexity when compared to conventional TFET. For biomolecule sensing in the device, a nanogap cavity is created within the gate dielectric by selectively etching a portion of the polarity gate dielectric layer towards the source side. The performance of the proposed biosensor device is evaluated based on the variations in carrier concentration profile, energy band diagram, electric field, transfer (I<sub><em>DS</em></sub> - V<sub><em>GS</em></sub>) characteristics, drain current (I<sub><em>DS</em></sub>) sensitivity, ON-state current (I<sub><em>ON</em></sub>) sensitivity, switching ratio (I<sub><em>ON</em></sub>/I<sub><em>OFF</em></sub>) and subthreshold swing (SS) sensitivity. The sensitivity of the device is also investigated based on nano-cavity dimensions, practical challenges such as various filling factors, and the step profile generated from the steric hindrance. Moreover, the effect of temperature on sensitivity has also been investigated. For this, various biomolecules including Streptavidin (<em>k</em> = 2.1), APTES (<em>k</em> = 3.57), ferrocytochrome c (<em>k</em> = 4.7), keratin (<em>k</em> = 8) and Gelatin (<em>k</em> = 12), have been investigated for their performance using Silvaco ATLAS device simulator. The simulation results demonstrate that the proposed biosensor is a viable option for biosensing applications in biomedical engineering.</p></div>","PeriodicalId":100923,"journal":{"name":"Micro and Nanostructures","volume":null,"pages":null},"PeriodicalIF":2.7000,"publicationDate":"2024-05-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Performance analysis of dual material control gate cavity on source electrically doped TFET biosensor for biomedical applications\",\"authors\":\"Dharmender , Kaushal Kumar Nigam , Piyush Yadav , Vinay Anand Tikkiwal\",\"doi\":\"10.1016/j.micrna.2024.207844\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><p>The fabrication complexity, low sensitivity, detection speed, and costs associated with nanoscale devices have been significant concerns in the development of label-free biosensors. To address these issues, we report a novel dual material control gate cavity on source electrically doped tunnel field-effect transistor (DM-CG-CS-ED-TFET) for label-free biosensors. In this regard, the <em>n</em><sup>+</sup> drain and <em>p</em><sup>+</sup> source regions within the proposed device are induced by applying polarity gate (PG) bias voltages of PG-1 = +1.2 V and PG-2 = −1.2 V, respectively, across the respective polarity gate electrodes. This approach not only overcomes doping control issues but also avoids thermal budget constraints and minimizes fabrication complexity when compared to conventional TFET. For biomolecule sensing in the device, a nanogap cavity is created within the gate dielectric by selectively etching a portion of the polarity gate dielectric layer towards the source side. The performance of the proposed biosensor device is evaluated based on the variations in carrier concentration profile, energy band diagram, electric field, transfer (I<sub><em>DS</em></sub> - V<sub><em>GS</em></sub>) characteristics, drain current (I<sub><em>DS</em></sub>) sensitivity, ON-state current (I<sub><em>ON</em></sub>) sensitivity, switching ratio (I<sub><em>ON</em></sub>/I<sub><em>OFF</em></sub>) and subthreshold swing (SS) sensitivity. The sensitivity of the device is also investigated based on nano-cavity dimensions, practical challenges such as various filling factors, and the step profile generated from the steric hindrance. Moreover, the effect of temperature on sensitivity has also been investigated. For this, various biomolecules including Streptavidin (<em>k</em> = 2.1), APTES (<em>k</em> = 3.57), ferrocytochrome c (<em>k</em> = 4.7), keratin (<em>k</em> = 8) and Gelatin (<em>k</em> = 12), have been investigated for their performance using Silvaco ATLAS device simulator. The simulation results demonstrate that the proposed biosensor is a viable option for biosensing applications in biomedical engineering.</p></div>\",\"PeriodicalId\":100923,\"journal\":{\"name\":\"Micro and Nanostructures\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":2.7000,\"publicationDate\":\"2024-05-14\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Micro and Nanostructures\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S2773012324000931\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"PHYSICS, CONDENSED MATTER\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Micro and Nanostructures","FirstCategoryId":"1085","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S2773012324000931","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"PHYSICS, CONDENSED MATTER","Score":null,"Total":0}
Performance analysis of dual material control gate cavity on source electrically doped TFET biosensor for biomedical applications
The fabrication complexity, low sensitivity, detection speed, and costs associated with nanoscale devices have been significant concerns in the development of label-free biosensors. To address these issues, we report a novel dual material control gate cavity on source electrically doped tunnel field-effect transistor (DM-CG-CS-ED-TFET) for label-free biosensors. In this regard, the n+ drain and p+ source regions within the proposed device are induced by applying polarity gate (PG) bias voltages of PG-1 = +1.2 V and PG-2 = −1.2 V, respectively, across the respective polarity gate electrodes. This approach not only overcomes doping control issues but also avoids thermal budget constraints and minimizes fabrication complexity when compared to conventional TFET. For biomolecule sensing in the device, a nanogap cavity is created within the gate dielectric by selectively etching a portion of the polarity gate dielectric layer towards the source side. The performance of the proposed biosensor device is evaluated based on the variations in carrier concentration profile, energy band diagram, electric field, transfer (IDS - VGS) characteristics, drain current (IDS) sensitivity, ON-state current (ION) sensitivity, switching ratio (ION/IOFF) and subthreshold swing (SS) sensitivity. The sensitivity of the device is also investigated based on nano-cavity dimensions, practical challenges such as various filling factors, and the step profile generated from the steric hindrance. Moreover, the effect of temperature on sensitivity has also been investigated. For this, various biomolecules including Streptavidin (k = 2.1), APTES (k = 3.57), ferrocytochrome c (k = 4.7), keratin (k = 8) and Gelatin (k = 12), have been investigated for their performance using Silvaco ATLAS device simulator. The simulation results demonstrate that the proposed biosensor is a viable option for biosensing applications in biomedical engineering.
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