基于表面声波的氢气传感器综述

IF 6.5 Q1 BIOTECHNOLOGY & APPLIED MICROBIOLOGY
Baile Cui , Zixuan Ren , Wen Wang , Lina Cheng , Xu Gao , Lintaihui Huang , Anyu Hu , Fanbing Hu , Jing Jin
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引用次数: 0

摘要

性能卓越的氢气(H2)传感器在 H2 能源的安全应用中发挥着重要作用。在目前的氢气检测技术中,基于表面声波(SAW)的氢气传感器因其灵敏度高、响应速度快、微纳尺度、稳定性好等特点而备受关注,它是由 SAW 传感芯片和沿声波传播路径沉积的传感材料组成,利用力-声-电多重物理场的耦合机制。在此,我们对声表面波 H2 传感器进行了综述,重点介绍了 H2 传感材料、声表面波传感机理、传感器件、传感电路以及发展现状。并对其发展趋势和面临的挑战进行了展望。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

Review of surface acoustic wave-based hydrogen sensor

Review of surface acoustic wave-based hydrogen sensor

Hydrogen (H2) sensors with excellent performance play an important role in the safety application of H2 energy. Among current H2 detection technologies, surface acoustic wave (SAW) based H2 sensors attract more attention due to their features of high sensitivity, fast response, mico-nano scale and excellent stability, which was composed of a SAW sensing chip and sensing materials depositing along the acoustic wave propagation path, and utilizing the coupling mechanism of force-acoustic-electric multiple physical fields. Here we review the SAW H2 sensor, focusing on the H2 sensing materials, SAW sensing mechanisms, sensing devices, sensing circuits, and development status. And prospects were made for its development trends and challenges.

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来源期刊
CiteScore
9.60
自引率
0.00%
发文量
60
审稿时长
49 days
期刊介绍: Sensors and Actuators Reports is a peer-reviewed open access journal launched out from the Sensors and Actuators journal family. Sensors and Actuators Reports is dedicated to publishing new and original works in the field of all type of sensors and actuators, including bio-, chemical-, physical-, and nano- sensors and actuators, which demonstrates significant progress beyond the current state of the art. The journal regularly publishes original research papers, reviews, and short communications. For research papers and short communications, the journal aims to publish the new and original work supported by experimental results and as such purely theoretical works are not accepted.
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