A. L. Stepanov, V. I. Nuzhdin, V. F. Valeev, D. A. Konovalov, A. M. Rogov
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引用次数: 0
摘要
研究了用能量 E = 30 keV、电流密度 J = 5 μA/cm2、高剂量 D = 1.8 × 1015-7.2 × 1016 离子/cm2 的 115In+ 离子辐照抛光单晶 c-Ge 基底的表面改性。样品形态由高分辨率扫描电子显微镜进行分析。结果表明，当超过 D = 1.9 × 1016 离子/cm2 时，会观察到由相互缠绕的纳米线组成的海绵状多孔结构（PGe）的形成。对 In:PGe 层的光学反射光谱 R 的测量表明，形成的 In:PGe 材料在 220-1050 纳米的光谱区域内 R 系数值较低。因此，这种层可以作为有效的抗反射涂层。
Modification of the Surface of Germanium and the Formation of a Porous Layer During Implantation with Indium Ions
The surface modification of a polished single-crystal c-Ge substrate irradiated with 115In+ ions at an energy of E = 30 keV, a current density of J = 5 μA/cm2, and a wide range of high doses D = 1.8 × 1015–7.2 × 1016 ion/cm2 is studied. The sample morphology is analyzed by high-resolution scanning electron microscopy. It is shown that when the value D = 1.9 × 1016 ion/cm2 is exceeded, the formation of a spongy porous structure (PGe) consisting of intertwining nanowires is observed. The geometric parameters of nanowires change with increasing D. Measurement of the optical reflection spectra R of the In:PGe layers demonstrated that the formed In:PGe material is characterized by a low value of the R coefficient in the spectral region of 220–1050 nm. Thus, such layer could serve as an effective antireflective coating.
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Nanobiotechnology Reports publishes interdisciplinary research articles on fundamental aspects of the structure and properties of nanoscale objects and nanomaterials, polymeric and bioorganic molecules, and supramolecular and biohybrid complexes, as well as articles that discuss technologies for their preparation and processing, and practical implementation of products, devices, and nature-like systems based on them. The journal publishes original articles and reviews that meet the highest scientific quality standards in the following areas of science and technology studies: self-organizing structures and nanoassemblies; nanostructures, including nanotubes; functional and structural nanomaterials; polymeric, bioorganic, and hybrid nanomaterials; devices and products based on nanomaterials and nanotechnology; nanobiology and genetics, and omics technologies; nanobiomedicine and nanopharmaceutics; nanoelectronics and neuromorphic computing systems; neurocognitive systems and technologies; nanophotonics; natural science methods in a study of cultural heritage items; metrology, standardization, and monitoring in nanotechnology.
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