模拟氩气和汞蒸汽混合物气体放电中带有薄介电薄膜的阴极的场电子发射对其溅射的影响

IF 0.5 Q4 PHYSICS, CONDENSED MATTER
G. G. Bondarenko, V. I. Kristya, D. O. Savichkin, M. R. Fisher
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引用次数: 0

摘要

摘要 我们提出了一个在阴极表面有薄电介质膜的氩气和汞蒸气混合物中进行低电流气体放电的模型。该模型考虑到了在这种混合物中,汞原子在与氩原子的逸散激发碰撞过程中发生电离,从而对工作气体的电离做出了重要贡献。正电荷在放电过程中聚集在薄膜表面,在电介质中形成电场,足以诱导场电子从电极的金属基底发射到电介质中。这些电子在电场的作用下在薄膜中加速,并从薄膜进入放电体积。这就提高了阴极的有效离子电子发射率。放电特性的温度相关性表明,随着温度的降低,混合物中汞蒸气的浓度迅速降低,放电间隙中的电场强度和放电电压也随之增加。阴极上的电介质薄膜可以改善其发射特性,并显著降低放电电压。这些现象导致轰击阴极表面的离子和原子能量降低,从而降低了放电中阴极溅射的强度。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

Simulating the Effect of Field Electron Emission from a Cathode with a Thin Dielectric Film on Its Sputtering in a Gas Discharge in an Argon and Mercury Vapor Mixture

Simulating the Effect of Field Electron Emission from a Cathode with a Thin Dielectric Film on Its Sputtering in a Gas Discharge in an Argon and Mercury Vapor Mixture

Simulating the Effect of Field Electron Emission from a Cathode with a Thin Dielectric Film on Its Sputtering in a Gas Discharge in an Argon and Mercury Vapor Mixture

We propose a model for a low-current gas discharge in a mixture of argon and mercury vapor in the presence of a thin dielectric film on the surface of a cathode. The model takes into account that in such a mixture, a significant contribution to ionization of the working gas can be made by the ionization of mercury atoms during their collisions with metastable excited argon atoms. Positive charges accumulate in the discharge on the surface of the film, creating an electric field in the dielectric sufficient to induce field electron emission from the metal substrate of the electrode into the dielectric. These electrons are accelerated in the film by an electric field and can exit it into the discharge volume. This increases the effective ion–electron emission yield of the cathode. The temperature dependences of the discharge characteristics show that due to a rapid decrease in the concentration of mercury vapor in the mixture with decreasing temperature, the electric-field strength in the discharge gap and the discharge voltage increase. The presence of a thin dielectric film on the cathode can improve its emission properties and significantly decrease the discharge voltage. These phenomena result in a decrease in the energy of ions and atoms bombarding the cathode surface and, consequently, a reduction in the intensity of cathode sputtering in the discharge.

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来源期刊
CiteScore
0.90
自引率
25.00%
发文量
144
审稿时长
3-8 weeks
期刊介绍: Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques publishes original articles on the topical problems of solid-state physics, materials science, experimental techniques, condensed media, nanostructures, surfaces of thin films, and phase boundaries: geometric and energetical structures of surfaces, the methods of computer simulations; physical and chemical properties and their changes upon radiation and other treatments; the methods of studies of films and surface layers of crystals (XRD, XPS, synchrotron radiation, neutron and electron diffraction, electron microscopic, scanning tunneling microscopic, atomic force microscopic studies, and other methods that provide data on the surfaces and thin films). Articles related to the methods and technics of structure studies are the focus of the journal. The journal accepts manuscripts of regular articles and reviews in English or Russian language from authors of all countries. All manuscripts are peer-reviewed.
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