JMEMS Letters.1pt 利用 20nm 独立式 Hf_{0.5}$Zr_{0.5}$O$_{2}$ 膜对温度敏感的纳米压电机械谐振器进行表征

IF 2.5 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Journal of Microelectromechanical Systems Pub Date : 2024-03-03 DOI:10.1109/JMEMS.2024.3392402

Jingyi Zhang;Haoqi Lyu;Wuhao Yang;Hai Zhong;Zhuohui Liu;Xiaorui Bie;Xingyin Xiong;Zheng Wang;Chen Ge;Xudong Zou

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引用次数: 0

摘要

我们研究了温度对基于 Hf0.5Zr0.5O2 薄膜的纳米压电机械谐振器谐振频率的影响。我们制作并测试了两个长度分别为 30 和 50 m 的方形谐振器，它们的谐振频率分别为 225.8 kHz 和 98.5 kHz。器件的频率温度系数（TCF）在-20 °C到147 °C的范围内进行了表征。在 30 ℃ 至 147 ℃ 范围内，两种器件都显示出约 83.6 ppm/°C 至 105 ppm/°C 的正 TCF，这可能是材料间热膨胀不匹配和 HZO 材料杨氏模量温度系数的共同作用结果。此外，在 -20 °C 至 30 °C 的范围内，50 $\mu$ m 器件显示出约 -110 ppm/°C 至 -99.9 ppm/°C 的负 TCF，这可能是由于加热过程中的应力松弛造成的。这些结果强调了 HZO 材料在纳米级压电谐振器应用中的重要意义，并为我们今后开发基于 HZO 的纳米级压电器件奠定了基础。[2024-0040]

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Characterization of a Temperature-Sensitive Nano Piezoelectric Mechanical Resonator With a 20nm Free-Standing Hf0.5Zr0.5O2 Membrane

We studied the temperature effects on the resonant frequency of nano piezoelectric mechanical resonators based on Hf0.5Zr0.5O2 thin films. Two square-shaped resonators of 30

$\mu$

m and 50

$\mu$

m in length were fabricated and tested, having a resonant frequency of 225.8 kHz and 98.5 kHz, respectively. The temperature coefficient of frequency (TCF) of the devices was characterized in the range from −20 °C to 147 °C. Both devices exhibited a positive TCF around 83.6 ppm/°C to 105 ppm/°C in the range from 30 °C to 147 °C, which may result from the combined effect of thermal expansion mismatch between the materials and the temperature coefficient of Young’s modulus of the HZO material. Moreover, the 50

$\mu$

m device shows a negative TCF around −110 ppm/°C to −99.9 ppm/°C within the range from −20 °C to 30 °C, which may be due to stress relaxation during the heating process. These results underscore the significance of HZO material in nanoscale piezoelectric resonator applications and lay the foundation for our future work aimed at developing nanoscale piezoelectric devices based on HZO. [2024-0040]

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来源期刊

Journal of Microelectromechanical Systems 工程技术-工程：电子与电气

CiteScore

6.20

自引率

7.40%

发文量

115

审稿时长

7.5 months

期刊介绍： The topics of interest include, but are not limited to: devices ranging in size from microns to millimeters, IC-compatible fabrication techniques, other fabrication techniques, measurement of micro phenomena, theoretical results, new materials and designs, micro actuators, micro robots, micro batteries, bearings, wear, reliability, electrical interconnections, micro telemanipulation, and standards appropriate to MEMS. Application examples and application oriented devices in fluidics, optics, bio-medical engineering, etc., are also of central interest.