利用分级三角光栅实现最佳纳米聚焦:提高 SERS 效率的新方法

IF 5.4 1区 物理与天体物理 Q1 OPTICS
APL Photonics Pub Date : 2024-04-26 DOI:10.1063/5.0195141
Ali Zeineddine, Moein Shayegannia, Nazir P. Kherani, Joel Y. Y. Loh
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引用次数: 0

摘要

等离子体分级纳米光栅可在宽波谱范围内实现多种共振模式的彩虹捕获,适用于分子物种的多通道表面增强拉曼光谱(SERS)。然而,矩形纳米光栅在实现高效彩虹捕获和定位宽光谱等离子体模式方面存在局限性,因为其阶梯式几何形状会导致表面等离子体极化子大量耗散到基底中。另一种分级三角形纳米凹槽平台可提高定位能力,并在相邻凹槽之间实现更有效的绝热转换。锥形几何中不同的凹槽角度、深度和周期可以平滑调整表面等离子体极化子的传播常数,从而减少损耗,并最大限度地实现凹槽尖端内部的纳米聚焦。为了克服湿法蚀刻硅的低纵横比限制,我们采用了一个多步骤工艺,即对二氧化硅阻挡层进行反应离子蚀刻以产生孔径宽度,然后再进行各向异性湿法蚀刻。由此产生的分级三角形纳米栅极在三种激光波长的激发下都表现出了极佳的 SERS 增强效果。在检测 1 µM 罗丹明 6G 时,638 和 785 nm 波长的增强因子分别为 8.5 × 109 和 9 × 108。此外,在 532 nm 激光激发波长下,分级三角形纳米栅对其他物种也显示出类似的增强因子,特别是对脂质 DPEE-PEG,其 SERS 增强因子高达 1.5 × 109。由于分级三角形光栅能够在三种不同的激光激发下产生明显的 SERS 反应,因此它们被明确称为 "彩虹捕获 "结构。更宽的孔径、更低的欧姆损耗以及超越传统蚀刻方法的沟槽角度调节能力,都预示着渐变三角光栅将成为微型传感器的卓越平台。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Exploiting graded triangular gratings for optimal nano-focusing: A novel approach to enhance SERS efficiency
Plasmonic graded nano-gratings enable rainbow trapping of multiple resonant modes over a wide wavelength spectrum, useful for multi-channel Surface Enhanced Raman Spectroscopy (SERS) of molecular species. However, rectangular nano-gratings have limitations in achieving efficient rainbow trapping and localizing a wide spectrum of plasmonic modes due to their stepwise geometry, which induces high dissipation of surface plasmon polaritons into the substrate. An alternative platform of graded triangular nano-gratings enables increased localization and more efficient adiabatic transformation between neighboring grooves. Varying groove angles, depths, and periods in the tapered geometry allow for smooth adjustment of the surface plasmon polariton propagation constant, reducing losses and maximizing nano-focusing inside the groove tips. To overcome the limitation of low aspect ratio in wet-etching silicon, we employed a multi-step process of reactive ion etching of a SiO2 barrier layer to generate aperture width, followed by anisotropic wet-etching. The resulting graded triangular nano-gratings showed excellent SERS enhancement along three laser wavelength excitations. The enhancement factors of 638 and 785 nm wavelengths are 8.5 × 109 and 9 × 108, respectively, for the detection of 1 µM Rhodamine 6G. In addition, graded triangular nano-gratings show similar enhancement factors for other species, specifically the lipid DPEE-PEG, at the 532 nm laser excitation wavelength with an excellent SERS enhancement factor of 1.5 × 109. Owing to the ability of the graded triangular gratings to elicit pronounced SERS responses across three distinct laser excitations, they unequivocally qualify as “rainbow trapping” structures. Wider apertures, lower ohmic losses, and the ability to tune the groove angle beyond conventional etching methods bode well for graded triangular gratings as a superior platform for miniature sensors.
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来源期刊
APL Photonics
APL Photonics Physics and Astronomy-Atomic and Molecular Physics, and Optics
CiteScore
10.30
自引率
3.60%
发文量
107
审稿时长
19 weeks
期刊介绍: APL Photonics is the new dedicated home for open access multidisciplinary research from and for the photonics community. The journal publishes fundamental and applied results that significantly advance the knowledge in photonics across physics, chemistry, biology and materials science.
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