Identifying the charge states of carbon vacancies in 4H-SiC by ab initio metadynamics

4H Silicon carbide (4H-SiC) is widely recognized as a highly promising material for high-voltage and high-power electronic applications due to its exceptional properties. The performance of devices based on 4H-SiC is often weakened by the presence of carbon-related point defects, particularly carbon vacancies (VC). The defects of VC introduce deep-level traps (e.g., Z1/2 and EH6/7) that deteriorate device functionality. Experimental and theoretical studies on VC have led to some conflicting results about the charge states of VC, especially for the charge state ordering of EH6/7. We now employ ab initio metadynamics (META) to systematically investigate configuration space including the direction and magnitude of bond distortion and identify the most stable structures of VC. Eventually, the charge states of VC in 4H-SiC are identified. The Z1 (EH6) and Z2 (EH7) indicate transitions from acceptor (donor) levels of VC, located on the h and k sublattice sites, respectively. Z1 and Z2 demonstrate negative-U ordering, characterized by U values of −0.16 and −0.37 eV, respectively. Conversely, EH6 and EH7 display positive-U ordering, with U values of 0.16 and 0.08 eV, respectively. The current results provide insights into the properties of VC in 4H-SiC, highlighting the effectiveness of META in the exploration of complex potential energy surfaces associated with point defects in solids.