利用四束激光干涉仪进行三维纳米位移测量

{"title":"利用四束激光干涉仪进行三维纳米位移测量","authors":"Xu Zhang, Zi Wang, Mengnan Liu, Zhengxun Song, Zuobin Wang, Litong Dong","doi":"10.1007/s41871-024-00230-z","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":52345,"journal":{"name":"Nanomanufacturing and Metrology","volume":"115 9","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-04-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Three-Dimensional Nano-displacement Measurement by Four-Beam Laser Interferometry\",\"authors\":\"Xu Zhang, Zi Wang, Mengnan Liu, Zhengxun Song, Zuobin Wang, Litong Dong\",\"doi\":\"10.1007/s41871-024-00230-z\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":52345,\"journal\":{\"name\":\"Nanomanufacturing and Metrology\",\"volume\":\"115 9\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2024-04-12\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Nanomanufacturing and Metrology\",\"FirstCategoryId\":\"1089\",\"ListUrlMain\":\"https://doi.org/10.1007/s41871-024-00230-z\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q1\",\"JCRName\":\"Engineering\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Nanomanufacturing and Metrology","FirstCategoryId":"1089","ListUrlMain":"https://doi.org/10.1007/s41871-024-00230-z","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"Engineering","Score":null,"Total":0}