锆钛酸铅(PZT)微机电致动器的自热与基底的关系

Yiwen Song, Kyuhwe Kang, P. Tipsawat, Christopher Y. Cheng, Wanlin Zhu, Michael LaBella, Sukwon Choi, Susan E. Trolier-McKinstry
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引用次数: 0

摘要

锆钛酸铅(PZT)薄膜在微机电系统(MEMS)中具有运动幅度大、驱动电压低和能量密度高等优点。根据不同的应用,有时需要使用不同的基底。由于畴壁运动的能量损失,PZT 微机电系统中会出现自热现象,这会降低设备的性能和可靠性。在这项工作中,研究了硅和玻璃上的 PZT 薄膜以及从基底上释放的薄膜的自加热情况,以了解基底对器件温升的影响。纳米粒子辅助拉曼测温法被用来量化这些 PZT 激励器的工作温升。使用有限元热模型对结果进行了验证,其中体积发热量是通过滞后损失实验确定的。不同基底上的 PZT 薄膜的体积发热量相似,而硅基底上的 PZT 薄膜由于通过高导热基底有效散热,温升最小。由于没有垂直散热,释放结构上的温升比玻璃基板上的温升高 6.8 倍。实验和建模结果表明,蚀刻后残留的一薄层硅在减轻器件自热效应方面起着至关重要的作用。这项研究的结果表明,高导热被动弹性层可作为一种有效的热管理解决方案,用于基于 PZT 的微机电致动器。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Substrate dependence of the self-heating in lead zirconate titanate (PZT) MEMS actuators
Lead zirconate titanate (PZT) thin films offer advantages in microelectromechanical systems (MEMSs) including large motion, lower drive voltage, and high energy densities. Depending on the application, different substrates are sometimes required. Self-heating occurs in the PZT MEMS due to the energy loss from domain wall motion, which can degrade the device performance and reliability. In this work, the self-heating of PZT thin films on Si and glass and a film released from a substrate were investigated to understand the effect of substrates on the device temperature rise. Nano-particle assisted Raman thermometry was employed to quantify the operational temperature rise of these PZT actuators. The results were validated using a finite element thermal model, where the volumetric heat generation was experimentally determined from the hysteresis loss. While the volumetric heat generation of the PZT films on different substrates was similar, the PZT films on the Si substrate showed a minimal temperature rise due to the effective heat dissipation through the high thermal conductivity substrate. The temperature rise on the released structure is 6.8× higher than that on the glass substrates due to the absence of vertical heat dissipation. The experimental and modeling results show that the thin layer of residual Si remaining after etching plays a crucial role in mitigating the effect of device self-heating. The outcomes of this study suggest that high thermal conductivity passive elastic layers can be used as an effective thermal management solution for PZT-based MEMS actuators.
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