{"title":"回顾：\"聚焦离子束纳米光刻技术的概念设计使用并集成了类似的组件：源、提取和加速、光学器件、扫描线圈、样品台、电子探测器等。有趣的是，聚焦离子束纳米光刻设备\"","authors":"Serena Amelia","doi":"10.32388/biwbqx","DOIUrl":null,"url":null,"abstract":"<jats:p/>","PeriodicalId":503632,"journal":{"name":"Qeios","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2024-04-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Review of: \\\"The conceptual design of focused ion beam nanolithography uses and integrates similar components: sources, extraction and acceleration, optics, scan coils, sample stage, electron detectors, etc. Interestingly, the focused ion beam nanolithography equipment\\\"\",\"authors\":\"Serena Amelia\",\"doi\":\"10.32388/biwbqx\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<jats:p/>\",\"PeriodicalId\":503632,\"journal\":{\"name\":\"Qeios\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2024-04-24\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Qeios\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.32388/biwbqx\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Qeios","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.32388/biwbqx","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Review of: "The conceptual design of focused ion beam nanolithography uses and integrates similar components: sources, extraction and acceleration, optics, scan coils, sample stage, electron detectors, etc. Interestingly, the focused ion beam nanolithography equipment"
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