在无合金化工艺的重度 Al+ 植入 p 型碳化硅上形成欧姆触点

IF 16.4 1区 化学 Q1 CHEMISTRY, MULTIDISCIPLINARY
Kotaro Kuwahara, Takeaki Kitawaki, Masahiro Hara, M. Kaneko, Tsunenobu Kimoto
{"title":"在无合金化工艺的重度 Al+ 植入 p 型碳化硅上形成欧姆触点","authors":"Kotaro Kuwahara, Takeaki Kitawaki, Masahiro Hara, M. Kaneko, Tsunenobu Kimoto","doi":"10.35848/1347-4065/ad43cf","DOIUrl":null,"url":null,"abstract":"\n Current–voltage (I–V) characteristics and contact resistivity (ρ\n c) of the Ni electrodes formed on heavily Al+-implanted p-type SiC without alloying process were investigated. A nearly ohmic I–V curve with ρ\n c of 9.3×10–2 Ωcm2 is demonstrated for non-alloyed Ni electrodes by very high-dose Al+ implantation (3.1×1020 cm−3). The net acceptor density dependence of the experimental ρ\n c can be described by a change in the contribution of direct tunneling and trap-assisted tunneling.","PeriodicalId":1,"journal":{"name":"Accounts of Chemical Research","volume":"32 9","pages":""},"PeriodicalIF":16.4000,"publicationDate":"2024-04-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Formation of ohmic contacts on heavily Al+-implanted p-type SiC without alloying process\",\"authors\":\"Kotaro Kuwahara, Takeaki Kitawaki, Masahiro Hara, M. Kaneko, Tsunenobu Kimoto\",\"doi\":\"10.35848/1347-4065/ad43cf\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\\n Current–voltage (I–V) characteristics and contact resistivity (ρ\\n c) of the Ni electrodes formed on heavily Al+-implanted p-type SiC without alloying process were investigated. A nearly ohmic I–V curve with ρ\\n c of 9.3×10–2 Ωcm2 is demonstrated for non-alloyed Ni electrodes by very high-dose Al+ implantation (3.1×1020 cm−3). The net acceptor density dependence of the experimental ρ\\n c can be described by a change in the contribution of direct tunneling and trap-assisted tunneling.\",\"PeriodicalId\":1,\"journal\":{\"name\":\"Accounts of Chemical Research\",\"volume\":\"32 9\",\"pages\":\"\"},\"PeriodicalIF\":16.4000,\"publicationDate\":\"2024-04-25\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Accounts of Chemical Research\",\"FirstCategoryId\":\"101\",\"ListUrlMain\":\"https://doi.org/10.35848/1347-4065/ad43cf\",\"RegionNum\":1,\"RegionCategory\":\"化学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q1\",\"JCRName\":\"CHEMISTRY, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Accounts of Chemical Research","FirstCategoryId":"101","ListUrlMain":"https://doi.org/10.35848/1347-4065/ad43cf","RegionNum":1,"RegionCategory":"化学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"CHEMISTRY, MULTIDISCIPLINARY","Score":null,"Total":0}
引用次数: 0

摘要

研究了在未进行合金化处理的重度铝+植入 p 型碳化硅上形成的镍电极的电流-电压(I-V)特性和接触电阻率(ρ c)。通过高剂量 Al+ 植入(3.1×1020 cm-3),非合金化镍电极的 I-V 曲线接近欧姆,ρ c 为 9.3×10-2 Ωcm2。实验性 ρ c 的净受体密度依赖性可以通过直接隧穿和陷阱辅助隧穿的贡献率变化来描述。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Formation of ohmic contacts on heavily Al+-implanted p-type SiC without alloying process
Current–voltage (I–V) characteristics and contact resistivity (ρ c) of the Ni electrodes formed on heavily Al+-implanted p-type SiC without alloying process were investigated. A nearly ohmic I–V curve with ρ c of 9.3×10–2 Ωcm2 is demonstrated for non-alloyed Ni electrodes by very high-dose Al+ implantation (3.1×1020 cm−3). The net acceptor density dependence of the experimental ρ c can be described by a change in the contribution of direct tunneling and trap-assisted tunneling.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
Accounts of Chemical Research
Accounts of Chemical Research 化学-化学综合
CiteScore
31.40
自引率
1.10%
发文量
312
审稿时长
2 months
期刊介绍: Accounts of Chemical Research presents short, concise and critical articles offering easy-to-read overviews of basic research and applications in all areas of chemistry and biochemistry. These short reviews focus on research from the author’s own laboratory and are designed to teach the reader about a research project. In addition, Accounts of Chemical Research publishes commentaries that give an informed opinion on a current research problem. Special Issues online are devoted to a single topic of unusual activity and significance. Accounts of Chemical Research replaces the traditional article abstract with an article "Conspectus." These entries synopsize the research affording the reader a closer look at the content and significance of an article. Through this provision of a more detailed description of the article contents, the Conspectus enhances the article's discoverability by search engines and the exposure for the research.
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术官方微信