高压条件下 AlScN 薄膜的压电性

IF 0.9 4区 物理与天体物理 Q4 PHYSICS, CONDENSED MATTER
Fares Kanouni, Fahima Arab, Saad Amara, Khaled Bouamama, Mohamed Halit
{"title":"高压条件下 AlScN 薄膜的压电性","authors":"Fares Kanouni,&nbsp;Fahima Arab,&nbsp;Saad Amara,&nbsp;Khaled Bouamama,&nbsp;Mohamed Halit","doi":"10.1134/S1063783423600309","DOIUrl":null,"url":null,"abstract":"<p>This study investigated the structural, mechanical, piezoelectric, and electromechanical properties of AlScN thin films using density functional theory (DFT) under varying levels of applied pressure, ranging from 0 to 20 GPa. The primary focus of this research is to explore the feasibility of optimizing AlScN thin films for surface acoustic wave (SAW) applications through pressure-induced modifications. Our findings reveal two significant outcomes. First, we observe a notable increase in the elastic constant <i>C</i><sub>33</sub> as a function of pressure. This increase signifies a substantial enhancement in material stiffness, directly influencing wave propagation and velocity within the thin films. Second, a remarkable 68% improvement in the piezoelectric constant, <i>d</i><sub>33</sub>, is identified for Al<sub>0.75</sub>Sc<sub>0.25</sub>N at an applied pressure of 20 GPa compared to Al<sub>0.75</sub>Sc<sub>0.25</sub>N at 0 GPa. This enhancement has a profound impact on the electromechanical coupling characteristics of the material. These results underscore the potential for tuning the piezoelectric response of AlScN thin films using applied pressure, offering a promising avenue for enhancing the performance of SAW-based AlScN devices.</p>","PeriodicalId":731,"journal":{"name":"Physics of the Solid State","volume":"65 2-6","pages":"111 - 118"},"PeriodicalIF":0.9000,"publicationDate":"2024-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"The Piezoelectricity of AlScN Thin Films under High-Pressure Regime\",\"authors\":\"Fares Kanouni,&nbsp;Fahima Arab,&nbsp;Saad Amara,&nbsp;Khaled Bouamama,&nbsp;Mohamed Halit\",\"doi\":\"10.1134/S1063783423600309\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<p>This study investigated the structural, mechanical, piezoelectric, and electromechanical properties of AlScN thin films using density functional theory (DFT) under varying levels of applied pressure, ranging from 0 to 20 GPa. The primary focus of this research is to explore the feasibility of optimizing AlScN thin films for surface acoustic wave (SAW) applications through pressure-induced modifications. Our findings reveal two significant outcomes. First, we observe a notable increase in the elastic constant <i>C</i><sub>33</sub> as a function of pressure. This increase signifies a substantial enhancement in material stiffness, directly influencing wave propagation and velocity within the thin films. Second, a remarkable 68% improvement in the piezoelectric constant, <i>d</i><sub>33</sub>, is identified for Al<sub>0.75</sub>Sc<sub>0.25</sub>N at an applied pressure of 20 GPa compared to Al<sub>0.75</sub>Sc<sub>0.25</sub>N at 0 GPa. This enhancement has a profound impact on the electromechanical coupling characteristics of the material. These results underscore the potential for tuning the piezoelectric response of AlScN thin films using applied pressure, offering a promising avenue for enhancing the performance of SAW-based AlScN devices.</p>\",\"PeriodicalId\":731,\"journal\":{\"name\":\"Physics of the Solid State\",\"volume\":\"65 2-6\",\"pages\":\"111 - 118\"},\"PeriodicalIF\":0.9000,\"publicationDate\":\"2024-04-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Physics of the Solid State\",\"FirstCategoryId\":\"101\",\"ListUrlMain\":\"https://link.springer.com/article/10.1134/S1063783423600309\",\"RegionNum\":4,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"PHYSICS, CONDENSED MATTER\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Physics of the Solid State","FirstCategoryId":"101","ListUrlMain":"https://link.springer.com/article/10.1134/S1063783423600309","RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"PHYSICS, CONDENSED MATTER","Score":null,"Total":0}
引用次数: 0

摘要

摘要 本研究使用密度泛函理论(DFT)研究了在 0 到 20 GPa 的不同外加压力下 AlScN 薄膜的结构、机械、压电和机电特性。这项研究的主要重点是探索通过压力引起的改性来优化表面声波 (SAW) 应用的 AlScN 薄膜的可行性。我们的研究结果揭示了两个重要成果。首先,我们观察到弹性常数 C33 随压力的变化而显著增加。这种增加意味着材料刚度的大幅提高,直接影响到薄膜内波的传播和速度。其次,与 0 GPa 时的 Al0.75Sc0.25N 相比,20 GPa 时的 Al0.75Sc0.25N 的压电常数 d33 明显提高了 68%。这种增强对材料的机电耦合特性有着深远的影响。这些结果凸显了利用外加压力调整 AlScN 薄膜压电响应的潜力,为提高基于声表面波的 AlScN 器件的性能提供了前景广阔的途径。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

The Piezoelectricity of AlScN Thin Films under High-Pressure Regime

The Piezoelectricity of AlScN Thin Films under High-Pressure Regime

This study investigated the structural, mechanical, piezoelectric, and electromechanical properties of AlScN thin films using density functional theory (DFT) under varying levels of applied pressure, ranging from 0 to 20 GPa. The primary focus of this research is to explore the feasibility of optimizing AlScN thin films for surface acoustic wave (SAW) applications through pressure-induced modifications. Our findings reveal two significant outcomes. First, we observe a notable increase in the elastic constant C33 as a function of pressure. This increase signifies a substantial enhancement in material stiffness, directly influencing wave propagation and velocity within the thin films. Second, a remarkable 68% improvement in the piezoelectric constant, d33, is identified for Al0.75Sc0.25N at an applied pressure of 20 GPa compared to Al0.75Sc0.25N at 0 GPa. This enhancement has a profound impact on the electromechanical coupling characteristics of the material. These results underscore the potential for tuning the piezoelectric response of AlScN thin films using applied pressure, offering a promising avenue for enhancing the performance of SAW-based AlScN devices.

求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
Physics of the Solid State
Physics of the Solid State 物理-物理:凝聚态物理
CiteScore
1.70
自引率
0.00%
发文量
60
审稿时长
2-4 weeks
期刊介绍: Presents the latest results from Russia’s leading researchers in condensed matter physics at the Russian Academy of Sciences and other prestigious institutions. Covers all areas of solid state physics including solid state optics, solid state acoustics, electronic and vibrational spectra, phase transitions, ferroelectricity, magnetism, and superconductivity. Also presents review papers on the most important problems in solid state physics.
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术官方微信