Fares Kanouni, Fahima Arab, Saad Amara, Khaled Bouamama, Mohamed Halit
{"title":"高压条件下 AlScN 薄膜的压电性","authors":"Fares Kanouni, Fahima Arab, Saad Amara, Khaled Bouamama, Mohamed Halit","doi":"10.1134/S1063783423600309","DOIUrl":null,"url":null,"abstract":"<p>This study investigated the structural, mechanical, piezoelectric, and electromechanical properties of AlScN thin films using density functional theory (DFT) under varying levels of applied pressure, ranging from 0 to 20 GPa. The primary focus of this research is to explore the feasibility of optimizing AlScN thin films for surface acoustic wave (SAW) applications through pressure-induced modifications. Our findings reveal two significant outcomes. First, we observe a notable increase in the elastic constant <i>C</i><sub>33</sub> as a function of pressure. This increase signifies a substantial enhancement in material stiffness, directly influencing wave propagation and velocity within the thin films. Second, a remarkable 68% improvement in the piezoelectric constant, <i>d</i><sub>33</sub>, is identified for Al<sub>0.75</sub>Sc<sub>0.25</sub>N at an applied pressure of 20 GPa compared to Al<sub>0.75</sub>Sc<sub>0.25</sub>N at 0 GPa. This enhancement has a profound impact on the electromechanical coupling characteristics of the material. These results underscore the potential for tuning the piezoelectric response of AlScN thin films using applied pressure, offering a promising avenue for enhancing the performance of SAW-based AlScN devices.</p>","PeriodicalId":731,"journal":{"name":"Physics of the Solid State","volume":"65 2-6","pages":"111 - 118"},"PeriodicalIF":0.9000,"publicationDate":"2024-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"The Piezoelectricity of AlScN Thin Films under High-Pressure Regime\",\"authors\":\"Fares Kanouni, Fahima Arab, Saad Amara, Khaled Bouamama, Mohamed Halit\",\"doi\":\"10.1134/S1063783423600309\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<p>This study investigated the structural, mechanical, piezoelectric, and electromechanical properties of AlScN thin films using density functional theory (DFT) under varying levels of applied pressure, ranging from 0 to 20 GPa. The primary focus of this research is to explore the feasibility of optimizing AlScN thin films for surface acoustic wave (SAW) applications through pressure-induced modifications. Our findings reveal two significant outcomes. First, we observe a notable increase in the elastic constant <i>C</i><sub>33</sub> as a function of pressure. This increase signifies a substantial enhancement in material stiffness, directly influencing wave propagation and velocity within the thin films. Second, a remarkable 68% improvement in the piezoelectric constant, <i>d</i><sub>33</sub>, is identified for Al<sub>0.75</sub>Sc<sub>0.25</sub>N at an applied pressure of 20 GPa compared to Al<sub>0.75</sub>Sc<sub>0.25</sub>N at 0 GPa. This enhancement has a profound impact on the electromechanical coupling characteristics of the material. These results underscore the potential for tuning the piezoelectric response of AlScN thin films using applied pressure, offering a promising avenue for enhancing the performance of SAW-based AlScN devices.</p>\",\"PeriodicalId\":731,\"journal\":{\"name\":\"Physics of the Solid State\",\"volume\":\"65 2-6\",\"pages\":\"111 - 118\"},\"PeriodicalIF\":0.9000,\"publicationDate\":\"2024-04-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Physics of the Solid State\",\"FirstCategoryId\":\"101\",\"ListUrlMain\":\"https://link.springer.com/article/10.1134/S1063783423600309\",\"RegionNum\":4,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"PHYSICS, CONDENSED MATTER\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Physics of the Solid State","FirstCategoryId":"101","ListUrlMain":"https://link.springer.com/article/10.1134/S1063783423600309","RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"PHYSICS, CONDENSED MATTER","Score":null,"Total":0}
The Piezoelectricity of AlScN Thin Films under High-Pressure Regime
This study investigated the structural, mechanical, piezoelectric, and electromechanical properties of AlScN thin films using density functional theory (DFT) under varying levels of applied pressure, ranging from 0 to 20 GPa. The primary focus of this research is to explore the feasibility of optimizing AlScN thin films for surface acoustic wave (SAW) applications through pressure-induced modifications. Our findings reveal two significant outcomes. First, we observe a notable increase in the elastic constant C33 as a function of pressure. This increase signifies a substantial enhancement in material stiffness, directly influencing wave propagation and velocity within the thin films. Second, a remarkable 68% improvement in the piezoelectric constant, d33, is identified for Al0.75Sc0.25N at an applied pressure of 20 GPa compared to Al0.75Sc0.25N at 0 GPa. This enhancement has a profound impact on the electromechanical coupling characteristics of the material. These results underscore the potential for tuning the piezoelectric response of AlScN thin films using applied pressure, offering a promising avenue for enhancing the performance of SAW-based AlScN devices.
期刊介绍:
Presents the latest results from Russia’s leading researchers in condensed matter physics at the Russian Academy of Sciences and other prestigious institutions. Covers all areas of solid state physics including solid state optics, solid state acoustics, electronic and vibrational spectra, phase transitions, ferroelectricity, magnetism, and superconductivity. Also presents review papers on the most important problems in solid state physics.