宽视场大面积长波红外硅金属透镜

IF 6.7 1区 物理与天体物理 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY
Hung-I. Lin, Jeffrey Geldmeier, Erwan Baleine, Fan Yang, Sensong An, Ying Pan, Clara Rivero-Baleine*, Tian Gu* and Juejun Hu, 
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引用次数: 0

摘要

长波红外(LWIR,波长 8-12 μm)光谱对热成像至关重要。传统的长波红外光学光学器件由单晶锗和镓瑀玻璃制成,既笨重又易碎。宽视场(FOV)光学器件面临的挑战更为严峻,传统的宽视场光学器件需要多个级联元件,严重增加了复杂性和成本。在此,我们设计并通过实验实现了基于块状硅晶片的 LWIR 金属透镜平台,其视场角为 140°。金属透镜的直径超过 4 厘米,采用可扩展的晶圆级工艺制造,包括光刻和深反应离子蚀刻。利用金属透镜集成焦平面阵列,我们进一步展示了广角热成像技术。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

Wide-Field-of-View, Large-Area Long-Wave Infrared Silicon Metalenses

Wide-Field-of-View, Large-Area Long-Wave Infrared Silicon Metalenses

Wide-Field-of-View, Large-Area Long-Wave Infrared Silicon Metalenses

Long-wave infrared (LWIR, 8–12 μm wavelengths) spectral spectra are of vital importance to thermal imaging. Conventional LWIR optics made from single-crystalline Ge and chalcogenide glasses are bulky and fragile. The challenge is exacerbated for wide-field-of-view (FOV) optics, which traditionally mandates multiple cascaded elements that severely add to complexity and cost. Here, we designed and experimentally realized a LWIR metalens platform based on bulk Si wafers featuring 140° FOV. The metalenses, which have diameters exceeding 4 cm, were fabricated using a scalable wafer-level process involving photolithography and deep reactive ion etching. Using a metalens-integrated focal plane array, we further demonstrated wide-angle thermal imaging.

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来源期刊
ACS Photonics
ACS Photonics NANOSCIENCE & NANOTECHNOLOGY-MATERIALS SCIENCE, MULTIDISCIPLINARY
CiteScore
11.90
自引率
5.70%
发文量
438
审稿时长
2.3 months
期刊介绍: Published as soon as accepted and summarized in monthly issues, ACS Photonics will publish Research Articles, Letters, Perspectives, and Reviews, to encompass the full scope of published research in this field.
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