Limin Qi , Rui Zheng , Dongli Liu , Haiyue Pei , Ding Zhao , Min Qiu
{"title":"用于冰光刻技术的微机械焦耳-汤姆逊低温冷却器","authors":"Limin Qi , Rui Zheng , Dongli Liu , Haiyue Pei , Ding Zhao , Min Qiu","doi":"10.1016/j.mee.2024.112180","DOIUrl":null,"url":null,"abstract":"<div><p>A micromachined Joule-Thomson cryocooler has been designed as a cryostage for ice lithography, which allows high-pressure nitrogen throttling to liquefy and fast cool samples with low vibration. The sample can be cooled down to 99.5 K in 30 min and then heated up to room temperature in 10 min. Compared with previous cooling systems based on liquid nitrogen, the Joule-Thomson cryostage has resulted in a significant 90% reduction in cooling time and a decrease in operating temperature by 30 K. Besides, the nitrogen mass-flow rate beneath the sample remains <20 mg/s to minimize vibration. The measured peak-to-peak amplitude at the minimum temperature is about 5.6 nm. As the first cooler integration within an ice lithography system, this Joule-Thomson cryostage not only enables the exploration of a wider range of ice resists, but also can be applied in kinds of microscopes for helping characterize materials at cryogenic temperatures.</p></div>","PeriodicalId":18557,"journal":{"name":"Microelectronic Engineering","volume":null,"pages":null},"PeriodicalIF":2.6000,"publicationDate":"2024-04-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"A micromachined Joule-Thomson cryocooler for ice lithography\",\"authors\":\"Limin Qi , Rui Zheng , Dongli Liu , Haiyue Pei , Ding Zhao , Min Qiu\",\"doi\":\"10.1016/j.mee.2024.112180\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><p>A micromachined Joule-Thomson cryocooler has been designed as a cryostage for ice lithography, which allows high-pressure nitrogen throttling to liquefy and fast cool samples with low vibration. The sample can be cooled down to 99.5 K in 30 min and then heated up to room temperature in 10 min. Compared with previous cooling systems based on liquid nitrogen, the Joule-Thomson cryostage has resulted in a significant 90% reduction in cooling time and a decrease in operating temperature by 30 K. Besides, the nitrogen mass-flow rate beneath the sample remains <20 mg/s to minimize vibration. The measured peak-to-peak amplitude at the minimum temperature is about 5.6 nm. As the first cooler integration within an ice lithography system, this Joule-Thomson cryostage not only enables the exploration of a wider range of ice resists, but also can be applied in kinds of microscopes for helping characterize materials at cryogenic temperatures.</p></div>\",\"PeriodicalId\":18557,\"journal\":{\"name\":\"Microelectronic Engineering\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":2.6000,\"publicationDate\":\"2024-04-09\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Microelectronic Engineering\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S0167931724000492\",\"RegionNum\":4,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Microelectronic Engineering","FirstCategoryId":"5","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0167931724000492","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
A micromachined Joule-Thomson cryocooler for ice lithography
A micromachined Joule-Thomson cryocooler has been designed as a cryostage for ice lithography, which allows high-pressure nitrogen throttling to liquefy and fast cool samples with low vibration. The sample can be cooled down to 99.5 K in 30 min and then heated up to room temperature in 10 min. Compared with previous cooling systems based on liquid nitrogen, the Joule-Thomson cryostage has resulted in a significant 90% reduction in cooling time and a decrease in operating temperature by 30 K. Besides, the nitrogen mass-flow rate beneath the sample remains <20 mg/s to minimize vibration. The measured peak-to-peak amplitude at the minimum temperature is about 5.6 nm. As the first cooler integration within an ice lithography system, this Joule-Thomson cryostage not only enables the exploration of a wider range of ice resists, but also can be applied in kinds of microscopes for helping characterize materials at cryogenic temperatures.
期刊介绍：
Microelectronic Engineering is the premier nanoprocessing, and nanotechnology journal focusing on fabrication of electronic, photonic, bioelectronic, electromechanic and fluidic devices and systems, and their applications in the broad areas of electronics, photonics, energy, life sciences, and environment. It covers also the expanding interdisciplinary field of "more than Moore" and "beyond Moore" integrated nanoelectronics / photonics and micro-/nano-/bio-systems. Through its unique mixture of peer-reviewed articles, reviews, accelerated publications, short and Technical notes, and the latest research news on key developments, Microelectronic Engineering provides comprehensive coverage of this exciting, interdisciplinary and dynamic new field for researchers in academia and professionals in industry.
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