带有 N 掺杂类金刚石碳夹层的金属半导体结构的阻抗响应和相位角测定

Nuray Urgun, Aylar Feizollahi Vahi̇d, J. Alsmael, B. Avar, S. O. Tan
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引用次数: 0

摘要

肖特基势垒二极管在太阳能电池、传感器、场效应晶体管栅堆栈、后端开关阵列和超级电容器等各种元件中的应用,基本上都是作为一种测试工具来生产性能更好的器件。这些设备的主要性能参数是通过其在温度、压力、电压、频率和辐射等所需条件下的传导机制来测量的。夹层设计是提高器件性能的关键之一。而这些夹层与专用杂质的存在,可以进一步控制半导体层和金属层的传导机制。作为一种可调节的杂质原子宿主材料,DLC 在热、化学和物理条件下也具有出色的性能,特别是在使用氮(N)、铜(Cu)、金(Au)、钛(Ti)和硅(Si)等掺杂原子时,是层间定制的理想候选材料。本研究调查了使用掺氮 DLC 中间膜制造的器件的阻抗响应。结果表明,由于绝缘层中相同材料的不同相之间形成了不同的结合,电荷的矩阵分布应通过水平和垂直介电弛豫外观影响传导路径,并改变相对介电率。相角变化支持的结果表明,频率可调的工作条件提供了可调的选择性电导。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Impedance Response and Phase Angle Determination of Metal-Semiconductor Structure with N-Doped Diamond Like Carbon Interlayer
Schottky Barrier Diodes have been studied largely in literature for their superior properties over p-n barriers in a wide range of components like solar cells, sensors, gate stacks of FETs, back-end-switch arrays, and super capacitor applications basically as a test tool to produce better performance devices. The main performance parameter of these devices is measured by their conduction mechanisms under desired conditions like temperature, pressure, voltage, frequency and radiation. And one of the pivotal enhancements on device performance is provided by interlayer addition through the sandwich design. And presence of these interlayers with on-purpose impurities, develops even more control of conduction mechanisms over semiconducting and metal layers. As an adjustable host material for impurity atoms, DLC, which also has outstanding specifications under thermal, chemical and physical conditions, is a good candidate for interlayer tailoring specifically when used with doping atoms like nitrogen (N), copper (Cu), gold (Au), titanium (Ti) and silicone (Si). This study investigates the impedance response of the fabricated device with an N-doped DLC interlayer. The results revealed that the reminiscent matrixial distribution of charges should be affecting the conduction path through horizontal and vertical dielectric relaxation appearance with altering relative permittivity due to different bond formations between different phases of the same material in the insulating layer. The supported results by phase angle changes, showing frequency-adjustable working conditions offer that the selective electrical conduction can be tuned.
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