{"title":"氧化铟锡薄膜的电热特性研究","authors":"A. Altinkok, Murat Olutas, Sevgi Altinkok","doi":"10.1142/s0217984924502294","DOIUrl":null,"url":null,"abstract":"Transparent conductive oxide (TCO) thin films are highly sought-after for their unique characteristics of conducting electricity and transmitting visible light, making them ideal conductive coating materials for electronic devices. We carried out a comprehensive analysis of the deposition, optical, electrical, and structural properties of ITO and Ag/ITO thin films on glass substrates in this study. The weight ratio of the deposited metals was 1:10, 2:10, and 4:10[Formula: see text]wt.% (Sn:In) for ITO films and 1:1:10[Formula: see text]wt.% (Ag:Sn:In) for Ag–ITO film. The films were annealed at 300°C using a program controller furnace. We employed infrared cameras to analyze the surface temperature profiles of these thin films under external voltage supply. We also investigated the resistivity behavior of both ITO and Ag–ITO films, analyzing them with regard to Mott’s variable range hopping (VRH) model and the fluctuation-induced tunneling model. Scanning electron microscope images revealed that adding Ag increased the grain size of ITO thin films. The average grain size for ITO thin film was determined as 186[Formula: see text]nm, while it was found to be 270[Formula: see text]nm for Ag–ITO thin film. Furthermore, incorporating Ag into the ITO thin film resulted in a reduction of 21.5% in transmittance over the complete visible range of the electromagnetic spectrum when compared to the ITO thin film without Ag as measured by ultra-visible spectrophotometer. The figure of merit was obtained as [Formula: see text] for ITO and [Formula: see text] for Ag–ITO thin films. However, the resistance of the ITO thin film was calculated to be 9.58[Formula: see text]k[Formula: see text], while that of the Ag–ITO film was found to be 6.99[Formula: see text]k[Formula: see text]. The ITO thin film that included Ag exhibited a lower electrical resistivity due to the larger grain size caused by doped Ag atoms in the structure, leading to less electron scattering at the grain boundaries and a resulting decrease in resistivity as determined by four-point probe system. Thermal imaging camera measurements revealed that the surface temperature of the ITO thin film decreased with the addition of Ag under high voltage application, but not under low voltage. When a voltage of 350[Formula: see text]V and 250[Formula: see text]V was applied to the thin films, the ITO film exhibited a surface temperature of 73.9°C and 50.4°C, whereas under identical conditions, the Ag–ITO film showed a surface temperature of 62°C and 44.1°C, respectively. Furthermore, both films exhibited exponentially increasing surface temperature behavior under a certain voltage, suggesting that they have potential for transparent heaters and high-voltage/low-current applications.","PeriodicalId":503716,"journal":{"name":"Modern Physics Letters B","volume":"154 4","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-02-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Investigation of electrothermal properties of indium-tin-oxide thin films\",\"authors\":\"A. Altinkok, Murat Olutas, Sevgi Altinkok\",\"doi\":\"10.1142/s0217984924502294\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Transparent conductive oxide (TCO) thin films are highly sought-after for their unique characteristics of conducting electricity and transmitting visible light, making them ideal conductive coating materials for electronic devices. We carried out a comprehensive analysis of the deposition, optical, electrical, and structural properties of ITO and Ag/ITO thin films on glass substrates in this study. The weight ratio of the deposited metals was 1:10, 2:10, and 4:10[Formula: see text]wt.% (Sn:In) for ITO films and 1:1:10[Formula: see text]wt.% (Ag:Sn:In) for Ag–ITO film. The films were annealed at 300°C using a program controller furnace. We employed infrared cameras to analyze the surface temperature profiles of these thin films under external voltage supply. We also investigated the resistivity behavior of both ITO and Ag–ITO films, analyzing them with regard to Mott’s variable range hopping (VRH) model and the fluctuation-induced tunneling model. Scanning electron microscope images revealed that adding Ag increased the grain size of ITO thin films. The average grain size for ITO thin film was determined as 186[Formula: see text]nm, while it was found to be 270[Formula: see text]nm for Ag–ITO thin film. Furthermore, incorporating Ag into the ITO thin film resulted in a reduction of 21.5% in transmittance over the complete visible range of the electromagnetic spectrum when compared to the ITO thin film without Ag as measured by ultra-visible spectrophotometer. The figure of merit was obtained as [Formula: see text] for ITO and [Formula: see text] for Ag–ITO thin films. However, the resistance of the ITO thin film was calculated to be 9.58[Formula: see text]k[Formula: see text], while that of the Ag–ITO film was found to be 6.99[Formula: see text]k[Formula: see text]. The ITO thin film that included Ag exhibited a lower electrical resistivity due to the larger grain size caused by doped Ag atoms in the structure, leading to less electron scattering at the grain boundaries and a resulting decrease in resistivity as determined by four-point probe system. Thermal imaging camera measurements revealed that the surface temperature of the ITO thin film decreased with the addition of Ag under high voltage application, but not under low voltage. When a voltage of 350[Formula: see text]V and 250[Formula: see text]V was applied to the thin films, the ITO film exhibited a surface temperature of 73.9°C and 50.4°C, whereas under identical conditions, the Ag–ITO film showed a surface temperature of 62°C and 44.1°C, respectively. 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引用次数: 0
摘要
透明导电氧化物(TCO)薄膜因其导电和透射可见光的独特特性而备受追捧,成为电子设备理想的导电涂层材料。在本研究中,我们对玻璃基底上的 ITO 和 Ag/ITO 薄膜的沉积、光学、电学和结构特性进行了全面分析。对于 ITO 薄膜,沉积金属的重量比分别为 1:10、2:10 和 4:10[式中:见正文]wt.%(Sn:In);对于 Ag-ITO 薄膜,沉积金属的重量比分别为 1:1:10[式中:见正文]wt.%(Ag:Sn:In)。薄膜使用程序控制炉在 300°C 下退火。我们使用红外相机分析了这些薄膜在外部电压供应下的表面温度曲线。我们还研究了 ITO 和 Ag-ITO 薄膜的电阻率行为,并根据莫特变程跳变(VRH)模型和波动诱导隧道模型对其进行了分析。扫描电子显微镜图像显示,添加 Ag 增加了 ITO 薄膜的晶粒尺寸。经测定,ITO 薄膜的平均晶粒大小为 186[式中:见正文]纳米,而 Ag-ITO 薄膜的平均晶粒大小为 270[式中:见正文]纳米。此外,根据超可见分光光度计的测量,与不含银的 ITO 薄膜相比,在整个电磁波谱的可见光范围内,在 ITO 薄膜中加入银的透射率降低了 21.5%。ITO 和 Ag-ITO 薄膜的优越性分别为[计算公式:见正文]和[计算公式:见正文]。然而,计算得出 ITO 薄膜的电阻为 9.58[式:见正文]k[式:见正文],而 Ag-ITO 薄膜的电阻为 6.99[式:见正文]k[式:见正文]。根据四点探针系统的测定,含有 Ag 的 ITO 薄膜显示出较低的电阻率,这是由于结构中掺杂的 Ag 原子导致晶粒尺寸变大,从而减少了晶界处的电子散射,电阻率也随之降低。热像仪测量结果显示,在高压应用下,ITO 薄膜的表面温度随着添加 Ag 而降低,但在低压应用下却没有降低。当对薄膜施加 350[式:见正文]伏和 250[式:见正文]伏电压时,ITO 薄膜的表面温度分别为 73.9°C 和 50.4°C,而在相同条件下,Ag-ITO 薄膜的表面温度分别为 62°C 和 44.1°C。此外,在一定电压下,这两种薄膜的表面温度都呈指数级上升,这表明它们具有透明加热器和高电压/低电流应用的潜力。
Investigation of electrothermal properties of indium-tin-oxide thin films
Transparent conductive oxide (TCO) thin films are highly sought-after for their unique characteristics of conducting electricity and transmitting visible light, making them ideal conductive coating materials for electronic devices. We carried out a comprehensive analysis of the deposition, optical, electrical, and structural properties of ITO and Ag/ITO thin films on glass substrates in this study. The weight ratio of the deposited metals was 1:10, 2:10, and 4:10[Formula: see text]wt.% (Sn:In) for ITO films and 1:1:10[Formula: see text]wt.% (Ag:Sn:In) for Ag–ITO film. The films were annealed at 300°C using a program controller furnace. We employed infrared cameras to analyze the surface temperature profiles of these thin films under external voltage supply. We also investigated the resistivity behavior of both ITO and Ag–ITO films, analyzing them with regard to Mott’s variable range hopping (VRH) model and the fluctuation-induced tunneling model. Scanning electron microscope images revealed that adding Ag increased the grain size of ITO thin films. The average grain size for ITO thin film was determined as 186[Formula: see text]nm, while it was found to be 270[Formula: see text]nm for Ag–ITO thin film. Furthermore, incorporating Ag into the ITO thin film resulted in a reduction of 21.5% in transmittance over the complete visible range of the electromagnetic spectrum when compared to the ITO thin film without Ag as measured by ultra-visible spectrophotometer. The figure of merit was obtained as [Formula: see text] for ITO and [Formula: see text] for Ag–ITO thin films. However, the resistance of the ITO thin film was calculated to be 9.58[Formula: see text]k[Formula: see text], while that of the Ag–ITO film was found to be 6.99[Formula: see text]k[Formula: see text]. The ITO thin film that included Ag exhibited a lower electrical resistivity due to the larger grain size caused by doped Ag atoms in the structure, leading to less electron scattering at the grain boundaries and a resulting decrease in resistivity as determined by four-point probe system. Thermal imaging camera measurements revealed that the surface temperature of the ITO thin film decreased with the addition of Ag under high voltage application, but not under low voltage. When a voltage of 350[Formula: see text]V and 250[Formula: see text]V was applied to the thin films, the ITO film exhibited a surface temperature of 73.9°C and 50.4°C, whereas under identical conditions, the Ag–ITO film showed a surface temperature of 62°C and 44.1°C, respectively. Furthermore, both films exhibited exponentially increasing surface temperature behavior under a certain voltage, suggesting that they have potential for transparent heaters and high-voltage/low-current applications.