以氮化硅膜为支撑的非晶碳化硅膜的制备与气体分离。

IF 3.3 4区工程技术 Q2 CHEMISTRY, PHYSICAL

Membranes Pub Date : 2024-03-02 DOI:10.3390/membranes14030063

Hengguo Jin, Xin Xu

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引用次数: 0

摘要

制备了一种支撑在氮化硅膜基底上的非晶碳氧硅膜。首先制备了含有聚氢甲基硅氧烷（PHMS）、四甲基四乙烯基环四硅氧烷（TMTVS）和铂催化剂的起始悬浮液，并将其旋涂于氮化硅膜上，然后对悬浮液进行交联和固化，接着在流动氩气环境下于 1000 °C 高温分解。厚度约为 1.8 µm 的致密无定形硅氧碳陶瓷膜与 Si3N4 膜基底牢固地结合在一起。H2 和 CO2 的单一气体渗透表明，在 25 °C 和 0.5 MPa 条件下，H2/CO2 的理想渗透选择性高达 20，且具有良好的长期稳定性。

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Preparation and Gas Separation of Amorphous Silicon Oxycarbide Membrane Supported on Silicon Nitride Membrane.

An amorphous silicon oxycarbide membrane supported on a silicon nitride membrane substrate was prepared. A starting suspension containing polyhydromethylsiloxane (PHMS), tetramethyltetravinyl-cyclotetrasiloxane (TMTVS) and a platinum catalyst was first prepared and spin-coated on a silicon nitride membrane, and then the suspension was cross-linked and cured, followed by pyrolyzing at 1000 °C under a flowing Ar atmosphere. A dense amorphous silicon oxycarbon ceramic membrane with a thickness of about 1.8 µm was strongly bonded to the Si₃N₄ membrane substrate. The single gas permeation of H₂ and CO₂ indicated that the ideal permeation selectivity of H₂/CO₂ was up to 20 at 25 °C and 0.5 MPa with good long-term stability, indicating the potential application of the obtained membrane for hydrogen purification.

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来源期刊

Membranes Chemical Engineering-Filtration and Separation

CiteScore

6.10

自引率

16.70%

发文量

1071

审稿时长

11 weeks

期刊介绍： Membranes (ISSN 2077-0375) is an international, peer-reviewed open access journal of separation science and technology. It publishes reviews, research articles, communications and technical notes. Our aim is to encourage scientists to publish their experimental and theoretical results in as much detail as possible. There is no restriction on the length of the papers. Full experimental and/or methodical details must be provided.