通过掺氢提高自对准顶栅 a-IGZO TFT 的电气性能和正偏压不稳定性

IF 16.4 1区化学 Q1 CHEMISTRY, MULTIDISCIPLINARY

Accounts of Chemical Research Pub Date : 2024-03-07 DOI:10.1088/1361-6641/ad3110

Yuan-Ming Liu, Jih-Chao Chiu, Yu-Ciao Chen, Yu-Cheng Fan, Rong-Wei Ma, Chia-Chun Yen, Tsang-Long Chen, C. Chou, Chee Wee Liu

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引用次数: 0

摘要

研究了硅烷（SiH4）和氨气（NH3）对自对准顶栅非晶 InGaZnO 薄膜晶体管中顶栅绝缘体和盖层的流速影响。氢密度随着 SiH4 和 NH3 流量的增加而增加。氢钝化可以改善场效应迁移率、阈下摆动（S.S.）和磁滞。氢掺入还能改善正偏压不稳定性。然而，过量的氢会导致负偏压照明应力（NBIS）下阈值电压的显著负偏移。此外，氢源最多的 TFT 在 NBIS 之后的 S.S.和滞后偏移情况最差。

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Enhancements of electrical properties and positive bias instability in self-aligned top-gate a-IGZO TFTs by hydrogen incorporation

Flow rate effects of the silane (SiH4) and ammonia (NH3) on the top gate insulator and the cap layer in self-aligned top-gate amorphous InGaZnO thin film transistors are investigated. The hydrogen density increases with increasing SiH4 and NH3 flow rates. Hydrogen passivation can improve the field-effect mobility, subthreshold swing (S.S.), hysteresis. The positive bias instability is also improved by hydrogen incorporation. However, the overabundance of hydrogen causes the significant negative threshold voltage shift under negative bias illumination stress (NBIS). Moreover, the most deteriorated S.S. and hysteresis shift after NBIS occur in the TFT with the most hydrogen source.

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来源期刊

Accounts of Chemical Research 化学-化学综合

CiteScore

31.40

自引率

1.10%

发文量

312

审稿时长

2 months

期刊介绍： Accounts of Chemical Research presents short, concise and critical articles offering easy-to-read overviews of basic research and applications in all areas of chemistry and biochemistry. These short reviews focus on research from the author’s own laboratory and are designed to teach the reader about a research project. In addition, Accounts of Chemical Research publishes commentaries that give an informed opinion on a current research problem. Special Issues online are devoted to a single topic of unusual activity and significance. Accounts of Chemical Research replaces the traditional article abstract with an article "Conspectus." These entries synopsize the research affording the reader a closer look at the content and significance of an article. Through this provision of a more detailed description of the article contents, the Conspectus enhances the article's discoverability by search engines and the exposure for the research.