用于真空和空气中动态质量传感的薄膜硅 MEMS 的勘误：相位噪声、阿兰偏差、质量灵敏度和检测极限" 的勘误表

IF 2.5 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Journal of Microelectromechanical Systems Pub Date : 2024-03-21 DOI:10.1109/JMEMS.2024.3375930

Rui M. R. Pinto;Pedro Brito;Virginia Chu;João Pedro Conde

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引用次数: 0

摘要

上述文章[1]将相位噪声理论应用于 MEMS 质量检测极限的预测，在公式（10）中发现了一个误差。该错误导致高估了频率分辨率 $\left(\Delta f_{\min }\right)$ 和检测极限 $(LoD)$ 。我们还发现了其他一些错字，借此机会在此更正，以飨读者。勘误如下：

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Erratum to “Thin-Film Silicon MEMS for Dynamic Mass Sensing in Vacuum and Air: Phase Noise, Allan Deviation, Mass Sensitivity and Limits of Detection”

In the above article [1] , which consists in the application of phase noise theory for the prediction of MEMS mass limit of detection, an error was found in Eq. (10) . The error resulted in the overestimation of the frequency resolution

$\left(\Delta f_{\min }\right)$

and the limit of detection

$(LoD)$

. A few other typos were also detected and we take the opportunity to correct them here, for the benefit of the reader. The errata follows below:

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来源期刊

Journal of Microelectromechanical Systems 工程技术-工程：电子与电气

CiteScore

6.20

自引率

7.40%

发文量

115

审稿时长

7.5 months

期刊介绍： The topics of interest include, but are not limited to: devices ranging in size from microns to millimeters, IC-compatible fabrication techniques, other fabrication techniques, measurement of micro phenomena, theoretical results, new materials and designs, micro actuators, micro robots, micro batteries, bearings, wear, reliability, electrical interconnections, micro telemanipulation, and standards appropriate to MEMS. Application examples and application oriented devices in fluidics, optics, bio-medical engineering, etc., are also of central interest.