具有三角形像素几何形状的线性图像传感器，专用于光截面法

IF 1.1 4区物理与天体物理 Q4 OPTICS

Optical Review Pub Date : 2024-03-22 DOI:10.1007/s10043-024-00872-w

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引用次数: 0

摘要

摘要我们提出了一种专门用于光断面法的线性图像传感器，以实现高速、低延迟的高度测量。这种线性图像传感器的像素呈三角形，分别指向上方和下方，因此可以快速读取数据，并对横截面剖面采集进行简单的数据处理。我们通过数值模拟证实了传感器的基本可行性。我们还制作了一个具有 508 个像素的传感器原型。我们对垂直平移台和阶梯金字塔形物体进行了高度测量，证实了所提议的传感器具有光截面法传感器的功能。

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Linear image sensor with triangular pixel geometry specialized for the light section method

Abstract

We propose a linear image sensor specialized for the light section method to achieve high-speed and low-latency height measurement. This linear image sensor has pixels in the shape of triangles pointing upward and downward, which allows fast data readout and simple data processing of the cross-sectional profile acquisition. We have confirmed the basic feasibility of the sensor by numerical simulation. We also fabricated a prototype of the proposed sensor with 508 pixels. We conducted height measurement of the vertical translate stage and the step pyramid-shaped object and confirmed that the proposed sensor functions as a sensor for light section method.

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来源期刊

Optical Review 物理-光学

CiteScore

2.30

自引率

0.00%

发文量

审稿时长

2 months

期刊介绍： Optical Review is an international journal published by the Optical Society of Japan. The scope of the journal is: General and physical optics; Quantum optics and spectroscopy; Information optics; Photonics and optoelectronics; Biomedical photonics and biological optics; Lasers; Nonlinear optics; Optical systems and technologies; Optical materials and manufacturing technologies; Vision; Infrared and short wavelength optics; Cross-disciplinary areas such as environmental, energy, food, agriculture and space technologies; Other optical methods and applications.