Analysis of Coupled Vibration Characteristics of Linear-Angular and Parameter Identification

A steady-state sinusoidal and distortion-free excitation source is very important for the accuracy and consistency of the calibration parameters of micro-electro-mechanical systems (MEMS) inertial sensors. To solve the problem that the current MEMS inertial measurement unit (IMU) calibration device is unable to reproduce the spatial motion of linear and angular vibration coupling, research topics on the coupling vibration characteristics and parameter identification for an electromagnetic linear-angular vibration exciter are proposed. This research paper used Ampere’s law and Lorentz force to establish the analytical expressions for the electromagnetic force and electromagnetic torque of the electromagnetic linear-angular vibration exciter. Then, the main purpose of this paper is to establish uniaxial and coupled vibration electromechanical analogy models containing mechanical parameters based on the admittance-type electromechanical analogy principle, and the parameter identification model is also obtained by combining the impedance formula with the additional mass method. Finally, the validity of the coupling vibration characteristics and the parameter identification model are verified by the frequency response simulation and the additional mass method, and the relative error of each parameter identification is within 5% in this paper.