{"title":"基于真空的未掺杂结构中 BTI 引起的劣化评估","authors":"Rakesh Kumar, Meena Panchore","doi":"10.1002/jnm.3223","DOIUrl":null,"url":null,"abstract":"<p>In this paper, an assessment of bias temperature instability (BTI) in <math>\n <semantics>\n <mrow>\n <mtext>high</mtext>\n <mo>−</mo>\n <mi>κ</mi>\n <mo>/</mo>\n <mtext>vacuum</mtext>\n </mrow>\n <annotation>$$ \\mathsf{high}-\\kappa /\\mathsf{vacuum} $$</annotation>\n </semantics></math> based dual gate dopingless JLFET (HKV-DLJLFET) is carried out at 15 nm technology node. For this, the gate dielectric of HKV-DGDLJLFET is made of asymmetric combination of <math>\n <semantics>\n <mrow>\n <mtext>high</mtext>\n <mo>−</mo>\n <mi>κ</mi>\n </mrow>\n <annotation>$$ \\mathsf{high}-\\kappa $$</annotation>\n </semantics></math> <math>\n <semantics>\n <mrow>\n <mfenced>\n <msub>\n <mi>hfO</mi>\n <mn>2</mn>\n </msub>\n </mfenced>\n </mrow>\n <annotation>$$ \\left({hfO}_2\\right) $$</annotation>\n </semantics></math> and vacuum dielectrics near the source/drain (S/D) side, which significantly minimizes the leakage current and enhances the reliability. Our simulation study have shown that the n-type HKV-DGDLJLFET exhibits 2.28 and 2.45 times less deterioration in drain current <math>\n <semantics>\n <mrow>\n <mfenced>\n <msub>\n <mi>I</mi>\n <mi>D</mi>\n </msub>\n </mfenced>\n </mrow>\n <annotation>$$ \\left({I}_D\\right) $$</annotation>\n </semantics></math> and transconductance <math>\n <semantics>\n <mrow>\n <mfenced>\n <msub>\n <mi>g</mi>\n <mi>m</mi>\n </msub>\n </mfenced>\n </mrow>\n <annotation>$$ \\left({g}_m\\right) $$</annotation>\n </semantics></math> respectively, than n-type HKV-DGJLFET due to positive BTI (PBTI) for 2000 seconds at <math>\n <semantics>\n <mrow>\n <msup>\n <mn>150</mn>\n <mi>o</mi>\n </msup>\n <mi>C</mi>\n </mrow>\n <annotation>$$ {150}^{\\mathrm{o}}\\mathrm{C} $$</annotation>\n </semantics></math>. Further, we have found that n-type HKV-DGDLJLFET has less deterioration in <math>\n <semantics>\n <mrow>\n <msub>\n <mi>V</mi>\n <mi>th</mi>\n </msub>\n </mrow>\n <annotation>$$ {V}_{th} $$</annotation>\n </semantics></math> and <math>\n <semantics>\n <mrow>\n <msub>\n <mi>g</mi>\n <mi>m</mi>\n </msub>\n </mrow>\n <annotation>$$ {g}_m $$</annotation>\n </semantics></math> due to BTI stress for different time spans. Hence, adding vacuum dielectric to the drain side lowers the BTI stress at high temperatures and makes it last longer.</p>","PeriodicalId":50300,"journal":{"name":"International Journal of Numerical Modelling-Electronic Networks Devices and Fields","volume":null,"pages":null},"PeriodicalIF":1.6000,"publicationDate":"2024-03-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Assessment of BTI-induced deterioration in vacuum based undoped structure\",\"authors\":\"Rakesh Kumar, Meena Panchore\",\"doi\":\"10.1002/jnm.3223\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<p>In this paper, an assessment of bias temperature instability (BTI) in <math>\\n <semantics>\\n <mrow>\\n <mtext>high</mtext>\\n <mo>−</mo>\\n <mi>κ</mi>\\n <mo>/</mo>\\n <mtext>vacuum</mtext>\\n </mrow>\\n <annotation>$$ \\\\mathsf{high}-\\\\kappa /\\\\mathsf{vacuum} $$</annotation>\\n </semantics></math> based dual gate dopingless JLFET (HKV-DLJLFET) is carried out at 15 nm technology node. For this, the gate dielectric of HKV-DGDLJLFET is made of asymmetric combination of <math>\\n <semantics>\\n <mrow>\\n <mtext>high</mtext>\\n <mo>−</mo>\\n <mi>κ</mi>\\n </mrow>\\n <annotation>$$ \\\\mathsf{high}-\\\\kappa $$</annotation>\\n </semantics></math> <math>\\n <semantics>\\n <mrow>\\n <mfenced>\\n <msub>\\n <mi>hfO</mi>\\n <mn>2</mn>\\n </msub>\\n </mfenced>\\n </mrow>\\n <annotation>$$ \\\\left({hfO}_2\\\\right) $$</annotation>\\n </semantics></math> and vacuum dielectrics near the source/drain (S/D) side, which significantly minimizes the leakage current and enhances the reliability. Our simulation study have shown that the n-type HKV-DGDLJLFET exhibits 2.28 and 2.45 times less deterioration in drain current <math>\\n <semantics>\\n <mrow>\\n <mfenced>\\n <msub>\\n <mi>I</mi>\\n <mi>D</mi>\\n </msub>\\n </mfenced>\\n </mrow>\\n <annotation>$$ \\\\left({I}_D\\\\right) $$</annotation>\\n </semantics></math> and transconductance <math>\\n <semantics>\\n <mrow>\\n <mfenced>\\n <msub>\\n <mi>g</mi>\\n <mi>m</mi>\\n </msub>\\n </mfenced>\\n </mrow>\\n <annotation>$$ \\\\left({g}_m\\\\right) $$</annotation>\\n </semantics></math> respectively, than n-type HKV-DGJLFET due to positive BTI (PBTI) for 2000 seconds at <math>\\n <semantics>\\n <mrow>\\n <msup>\\n <mn>150</mn>\\n <mi>o</mi>\\n </msup>\\n <mi>C</mi>\\n </mrow>\\n <annotation>$$ {150}^{\\\\mathrm{o}}\\\\mathrm{C} $$</annotation>\\n </semantics></math>. Further, we have found that n-type HKV-DGDLJLFET has less deterioration in <math>\\n <semantics>\\n <mrow>\\n <msub>\\n <mi>V</mi>\\n <mi>th</mi>\\n </msub>\\n </mrow>\\n <annotation>$$ {V}_{th} $$</annotation>\\n </semantics></math> and <math>\\n <semantics>\\n <mrow>\\n <msub>\\n <mi>g</mi>\\n <mi>m</mi>\\n </msub>\\n </mrow>\\n <annotation>$$ {g}_m $$</annotation>\\n </semantics></math> due to BTI stress for different time spans. Hence, adding vacuum dielectric to the drain side lowers the BTI stress at high temperatures and makes it last longer.</p>\",\"PeriodicalId\":50300,\"journal\":{\"name\":\"International Journal of Numerical Modelling-Electronic Networks Devices and Fields\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":1.6000,\"publicationDate\":\"2024-03-08\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"International Journal of Numerical Modelling-Electronic Networks Devices and Fields\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://onlinelibrary.wiley.com/doi/10.1002/jnm.3223\",\"RegionNum\":4,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Journal of Numerical Modelling-Electronic Networks Devices and Fields","FirstCategoryId":"5","ListUrlMain":"https://onlinelibrary.wiley.com/doi/10.1002/jnm.3223","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 0
摘要
本文在 15 纳米技术节点上对基于高 - κ / 真空 $$ \mathsf{high}-\kappa /\mathsf{vacuum} $$ 的双栅极无掺杂 JLFET (HKV-DLJLFET) 的偏置温度不稳定性 (BTI) 进行了评估。为此,HKV-DGDLJLFET 的栅极电介质由靠近源极/漏极(S/D)侧的高-κ $$ \mathsf{high}-\kappa $$ hfO 2 $$ \left({hfO}_2\right)$$和真空电介质不对称组合而成,从而显著降低了漏电流并提高了可靠性。我们的仿真研究表明,在 150 o C 下工作 2000 秒,n 型 HKV-DGDLJLFET 在漏极电流 I D $ \left({I}_D\right) $$ 和跨导 g m $ \left({g}_m\right) $$ 方面的劣化程度分别是 n 型 HKV-DGJLFET 的 2.28 倍和 2.45 倍。此外,我们还发现,在不同的时间跨度内,n 型 HKV-DGDLJLFET 因 BTI 应力而导致的 V th $$ {V}_{th} $$ 和 g m $$ {g}_m $$ 劣化较小。因此,在漏极侧添加真空电介质可降低高温下的 BTI 应力,延长其使用寿命。
Assessment of BTI-induced deterioration in vacuum based undoped structure
In this paper, an assessment of bias temperature instability (BTI) in based dual gate dopingless JLFET (HKV-DLJLFET) is carried out at 15 nm technology node. For this, the gate dielectric of HKV-DGDLJLFET is made of asymmetric combination of and vacuum dielectrics near the source/drain (S/D) side, which significantly minimizes the leakage current and enhances the reliability. Our simulation study have shown that the n-type HKV-DGDLJLFET exhibits 2.28 and 2.45 times less deterioration in drain current and transconductance respectively, than n-type HKV-DGJLFET due to positive BTI (PBTI) for 2000 seconds at . Further, we have found that n-type HKV-DGDLJLFET has less deterioration in and due to BTI stress for different time spans. Hence, adding vacuum dielectric to the drain side lowers the BTI stress at high temperatures and makes it last longer.
期刊介绍:
Prediction through modelling forms the basis of engineering design. The computational power at the fingertips of the professional engineer is increasing enormously and techniques for computer simulation are changing rapidly. Engineers need models which relate to their design area and which are adaptable to new design concepts. They also need efficient and friendly ways of presenting, viewing and transmitting the data associated with their models.
The International Journal of Numerical Modelling: Electronic Networks, Devices and Fields provides a communication vehicle for numerical modelling methods and data preparation methods associated with electrical and electronic circuits and fields. It concentrates on numerical modelling rather than abstract numerical mathematics.
Contributions on numerical modelling will cover the entire subject of electrical and electronic engineering. They will range from electrical distribution networks to integrated circuits on VLSI design, and from static electric and magnetic fields through microwaves to optical design. They will also include the use of electrical networks as a modelling medium.