抑制微阵列敏感单元热串扰的两级绝缘方法

IF 2.3 4区物理与天体物理 Q3 PHYSICS, APPLIED

Applied Physics Express Pub Date : 2024-03-06 DOI:10.35848/1882-0786/ad2b00

Shining Zhu, Xin Li, Zhengjie Luo, Xuguang Jia, Yue Qin, Hao Guo, Jun Tang, Zhonghao Li, Huanfei Wen, Zongmin Ma and Jun Liu

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引用次数: 0

摘要

阵列结构之间的热串扰是限制微纳阵列传感器灵敏度的关键因素。我们提出了一种带有导热孔和散热层的两级热隔离结构，并通过脉冲电压加热来减少热串扰。通过有限元热仿真分析和热干扰测试，结果表明与没有热隔离的结构相比，两级结构的热串扰在稳态下分别减少了 12.89% 和 39.67%，脉冲电压加热使两级结构的热串扰小于 10%。

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A two-stage insulation method for suppressing thermal crosstalk in microarray sensitive units

Thermal crosstalk between array structures is a key factor in limiting the sensitivity of micro-nano array sensors. We propose a two-stage thermally isolated structure with thermal holes and heat dissipation layer and pulsed voltage heating to reduce thermal crosstalk. Through finite element thermal simulation analysis as well as thermal interference test, the results show that the thermal crosstalk of the two-stage structure is reduced by 12.89% and 39.67%, respectively, in the steady state compared to the structure with no thermal isolation, and pulsed voltage heating leads to the thermal crosstalk of the two-stage structure to be <10%.

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来源期刊

Applied Physics Express 物理-物理：应用

CiteScore

4.80

自引率

8.70%

发文量

310

审稿时长

1.2 months

期刊介绍： Applied Physics Express (APEX) is a letters journal devoted solely to rapid dissemination of up-to-date and concise reports on new findings in applied physics. The motto of APEX is high scientific quality and prompt publication. APEX is a sister journal of the Japanese Journal of Applied Physics (JJAP) and is published by IOP Publishing Ltd on behalf of the Japan Society of Applied Physics (JSAP).