Al2O3 厚度和氧化剂前驱体对 Al2O3/GaN 结构中界面成分和污染的影响

IF 16.4 1区化学 Q1 CHEMISTRY, MULTIDISCIPLINARY

Accounts of Chemical Research Pub Date : 2024-03-04 DOI:10.1002/sia.7299

Tarek Spelta, Eugénie Martinez, Marc Veillerot, Pedro Fernandes Paes Pinto Rocha, Laura Vauche, Bassem Salem, Bérangère Hyot

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引用次数: 0

摘要

本文采用飞行时间二次离子质谱法（ToF-SIMS）和硬 X 射线光电子能谱法（HAXPES）研究了下一代氮化镓（GaN）晶体管的 Al2O3/GaN 临界埋藏界面。结果表明，当 Al2O3 的厚度从 3 纳米增加到 20 纳米时，该界面上的镓氧化作用会增强。与 Al2O3 生长过程中仅使用 H2O 相比，同时使用 O3 和 H2O 作为氧化剂前驱体时，镓的氧化作用会减弱。此外，基于 O3/H2O 的 Al2O3 有利于减少氢和碳等污染物，但会增加 Al2O3/GaN 界面的卤化物（Cl- 和 F-）。

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Effect of Al2O3 thickness and oxidant precursors on the interface composition and contamination in Al2O3/GaN structures

In this paper, we investigate the Al2O3/GaN critical buried interface of the next generation of gallium nitride (GaN)‐based transistors using time‐of‐flight secondary ion mass spectrometry (ToF‐SIMS) and hard X‐ray photoelectron spectroscopy (HAXPES). Results highlight that gallium oxidation at this interface is enhanced when increasing the Al2O3 thickness from 3 up to 20 nm. Gallium oxidation is reduced when using both O3 and H2O as oxidant precursors, compared with only H2O during the growth of Al2O3. In addition, the O3/H2O‐based Al2O3 favors a reduction of contaminants such as hydrogen and carbon but enhances the presence of halides (Cl− and F−) at this Al2O3/GaN interface.

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来源期刊

Accounts of Chemical Research 化学-化学综合

CiteScore

31.40

自引率

1.10%

发文量

312

审稿时长

2 months

期刊介绍： Accounts of Chemical Research presents short, concise and critical articles offering easy-to-read overviews of basic research and applications in all areas of chemistry and biochemistry. These short reviews focus on research from the author’s own laboratory and are designed to teach the reader about a research project. In addition, Accounts of Chemical Research publishes commentaries that give an informed opinion on a current research problem. Special Issues online are devoted to a single topic of unusual activity and significance. Accounts of Chemical Research replaces the traditional article abstract with an article "Conspectus." These entries synopsize the research affording the reader a closer look at the content and significance of an article. Through this provision of a more detailed description of the article contents, the Conspectus enhances the article's discoverability by search engines and the exposure for the research.