Integration of piezoelectric and electrothermal actuators for high-resolution Atomic Force Microscopy

The development of ultrasensitive silicon-based microcantilevers has significantly improved the imaging resolution of the Atomic Force Microscope (AFM). However, most of these microcantilevers require one or more external actuators and sensors for imaging, thus increasing the footprint and operational complexity of the instrument. Here we propose a novel active microcantilever that does not require any external actuator apart from the sample positioner to perform high-resolution AFM imaging. The proposed microcantilever is equipped with two different on-chip actuators: a piezoelectric actuator for oscillating the probe at a high frequency and an electrothermal actuator for providing large-range Z-motion. An on-chip differential piezoelectric sensor measures probe oscillation during imaging. To demonstrate the proof of concept, the microcantilever was microfabricated and integrated with an in-house developed AFM setup comprising of sample positioner and drive electronics. Finally, 3 different calibration gratings were imaged with a closed-loop bandwidth of $150\mathrm{Hz}$.