原子层沉积形成的氟化镁的光学、化学和覆盖特性

IF 1.1 4区物理与天体物理 Q4 OPTICS

Optical Review Pub Date : 2024-03-02 DOI:10.1007/s10043-024-00867-7

Yuma Sugai, Hironori Sugata, Takuya Sugawara, Safdar Muhammad, Jani Hämäläinen, Nina Lamminmäki, Juhana Kostamo

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引用次数: 0

摘要

研究了利用原子层沉积 (ALD) 技术沉积的氟化镁 (MgF2) 薄膜在光学镀膜、元表面抗反射层和化学电阻钝化方面的应用。沉积在市售的 Picosun® R-200 高级 ALD 反应器中进行。对薄膜的成分、密度、光学特性、化学电阻率和覆盖率进行了表征。ALD 沉积薄膜在波长低至 350 纳米时具有高 R + T 值、出色的 3D 覆盖率和高化学电阻率。这项技术具有独特的性能，可改善三维结构光学，如超表面。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

Optical, chemical and coverage properties of magnesium fluoride formed by atomic layer deposition

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Optical, chemical and coverage properties of magnesium fluoride formed by atomic layer deposition

Magnesium fluoride (MgF₂) thin films deposited using atomic layer deposition (ALD) were studied for use as optical coatings, meta-surface anti-reflection layer, and chemically resistive passivation. The deposition was performed in a commercially available Picosun® R-200 Advanced ALD reactor. Characterization of composition, density, optical property, chemical resistivity and coverage were performed. ALD-deposited films showed high R + T at wavelength down to 350 nm, excellent 3D coverage, and high chemical resistivity. This technology enables unique properties to improve 3D structured optics such as metasurface.

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来源期刊

Optical Review 物理-光学

CiteScore

2.30

自引率

0.00%

发文量

审稿时长

2 months

期刊介绍： Optical Review is an international journal published by the Optical Society of Japan. The scope of the journal is: General and physical optics; Quantum optics and spectroscopy; Information optics; Photonics and optoelectronics; Biomedical photonics and biological optics; Lasers; Nonlinear optics; Optical systems and technologies; Optical materials and manufacturing technologies; Vision; Infrared and short wavelength optics; Cross-disciplinary areas such as environmental, energy, food, agriculture and space technologies; Other optical methods and applications.