OLED 结构制造技术。基本参数控制

IF 1.1 3区 化学 Q4 CHEMISTRY, INORGANIC & NUCLEAR
S. I. Pozin, E. I. Mal’tsev, D. A. Lypenko, A. V. Dmitriev, A. V. Vannikov, A. S. Burlov, V. G. Vlasenko
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引用次数: 0

摘要

摘要 本文是《基于金属配位化合物的电致发光有机发光二极管》一书的节选,经过翻译、修订和更新。Fed.2015;ISBN 978-5-9275-1469-4(参见附加信息)。电致发光实验室样品制造的主要技术阶段已大致介绍。更详细地介绍了实验室最常用的半导体有机薄膜形成技术,如溶液旋涂和真空热沉积。此外,还概述了我们实验室使用的一些方法。详细介绍了用干涉法和原子力显微镜测量聚合物层厚度的方法。对于干涉法,研究了系统误差的主要来源。关于原子力显微镜(AFM),考虑了两种测量厚度的技术:明示技术(宏针划痕)和在接触模式下使用原子力显微镜探针划痕。确定了与第一种技术相关的系统误差,随后就其潜在应用提出了建议。最后一节强调了在薄膜沉积过程中校准厚度传感器所需的调整,如果校准是根据宏针划痕结果进行的话。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

Manufacturing Technology of OLED Structures. Control of Basic Parameters

Manufacturing Technology of OLED Structures. Control of Basic Parameters

Manufacturing Technology of OLED Structures. Control of Basic Parameters

The article represents a translated, revised, and updated excerpt from the book Electroluminescent Organic Light-Emitting Diodes Based on Metal Coordination Compounds, Rostov-on-Don: Yuzhn. Fed. Univ., 2015; ISBN 978-5-9275-1469-4 (see Additional Information). The main technological stages for manufacturing of laboratory samples for electroluminescence are described in general terms. The most popular laboratory techniques for the formation of thin semiconducting organic films, such as solution spin coating and vacuum thermal deposition, are considered in more detail. Some methodological approaches used in our laboratory are outlined. Measurements of the polymer layer thickness by the interference method and by atomic force microscopy are considered in detail. For the interference method, the principal sources of systematic errors are examined. Concerning atomic force microscopy (AFM), two techniques for measuring thickness are considered: the express technique (macro-needle scratching) and scratching with an AFM probe in contact mode. Systematic errors associated with the first technique are determined, followed by recommendations regarding its potential application. The last section highlights the necessary adjustment for calibrating thickness sensors during film deposition if the calibration is conducted based on macro-needle scratching results.

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来源期刊
Russian Journal of Coordination Chemistry
Russian Journal of Coordination Chemistry 化学-无机化学与核化学
CiteScore
2.40
自引率
15.80%
发文量
85
审稿时长
7.2 months
期刊介绍: Russian Journal of Coordination Chemistry is a journal that publishes reviews, original papers, and short communications on all aspects of theoretical and experimental coordination chemistry. Modern coordination chemistry is an interdisciplinary science that makes a bridge between inorganic, organic, physical, analytical, and biological chemistry.
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