高功率 MUTC-PD 的带宽优化与制造

IF 2.2 3区工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC

IEEE Journal of Quantum Electronics Pub Date : 2024-02-20 DOI:10.1109/JQE.2024.3367951

Xuejie Wang;Yongqing Huang;Shuhu Tan;Jiawei Du;Mingxi Yang;Kai Liu;Xiaofeng Duan;Xiaomin Ren

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引用次数: 0

摘要

优化并制造了一种高速、高功率的改进型单向传输载流子光电二极管（MUTC-PD）。该优化方法以载流子传输为核心，首次考虑了 MUTC-PD 的空穴传输时间限制带宽。考虑到电子传输时间和 RC 时间常数对器件性能的影响，对器件进行了模拟和制作。在结构外延中，建议使用分级掺杂来拟合高斯掺杂，以减少外延生长误差。此外，还研究了调制深度对高速和大功率性能的影响。

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Bandwidth Optimization and Fabrication of High-Power MUTC-PD

A high-speed and high-power modified uni-traveling-carrier photodiode (MUTC-PD) is optimized and fabricated. The optimization method takes carrier transport as the core and considers the hole transport time limited bandwidth of the MUTC-PD for the first time. Taking into account the impact of the electron transport time and RC time constant on device performance, the device is simulated and fabricated. In structure epitaxy, it is proposed to use graded doping to fit Gaussian doping to reduce the epitaxial growth error. The measured bandwidth of the MUTC-PD reaches 34 GHz and the RF output power reaches 17.1 dBm with the mesa diameter of

$20~\mu \text{m}$

. In addition, the influence of modulation depth on high-speed and high-power performance is studied.

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来源期刊

IEEE Journal of Quantum Electronics 工程技术-工程：电子与电气

CiteScore

4.70

自引率

4.00%

发文量

审稿时长

3.0 months

期刊介绍： The IEEE Journal of Quantum Electronics is dedicated to the publication of manuscripts reporting novel experimental or theoretical results in the broad field of the science and technology of quantum electronics. The Journal comprises original contributions, both regular papers and letters, describing significant advances in the understanding of quantum electronics phenomena or the demonstration of new devices, systems, or applications. Manuscripts reporting new developments in systems and applications must emphasize quantum electronics principles or devices. The scope of JQE encompasses the generation, propagation, detection, and application of coherent electromagnetic radiation having wavelengths below one millimeter (i.e., in the submillimeter, infrared, visible, ultraviolet, etc., regions). Whether the focus of a manuscript is a quantum-electronic device or phenomenon, the critical factor in the editorial review of a manuscript is the potential impact of the results presented on continuing research in the field or on advancing the technological base of quantum electronics.