电极结构对栅极直流辉光放电中阴极后等离子体的影响

IF 1.3 4区 物理与天体物理 Q3 PHYSICS, FLUIDS & PLASMAS
Yiqun Ma, Xingbao Lyu, Chengxun Yuan, Svetlana Avtaeva, Anatoly Kudryavtsev, Zhongxiang Zhou
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引用次数: 0

摘要

研究了栅电极放电产生的阴极后等离子体的放电特性。阴极后等离子体是在开放式放电中产生的等离子体,位于阴极的另一侧,与电极间隙不同。根据独特的电子传输,对放电室参数进行了调整,以比较它们对阴极后等离子体电子密度的影响。栅极阴极孔内电子流的峰值和阴极后等离子体厚度的峰值出现在相同直径的栅极电极孔内,这表明栅极阴极内的电子传输对阴极后等离子体有着至关重要的影响。研究还考察了阴极厚度和气体压力对阴极后等离子体厚度的综合影响。研究结果表明,影响阴极后等离子体厚度的主要因素是栅阴极内的电子传输。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Impact of the electrode structure on post-cathode plasma in the grid electrode DC glow discharge

The discharge properties of post-cathode plasma generated by grid electrode discharge were investigated. Post-cathode plasma is the plasma, generated in an open discharge, at the other side of the cathode that is different from the electrode gap. Based on the unique electron transport, discharge chamber parameters were adjusted to compare their impact on the electron density of the post-cathode plasma. The peak of the electron flow in the grid cathode hole and the peak of the post-cathode plasma thickness appear in the same diameter of the grid electrode holes, which shows the crucial influence of the electron transport within the grid cathode on the post-cathode plasma. The study also investigated the combined effects of cathode thickness and gas pressure on post-cathode plasma thickness. The findings suggest that the primary factor influencing post-cathode plasma thickness is the electron transport within the grid cathode.

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来源期刊
Contributions to Plasma Physics
Contributions to Plasma Physics 物理-物理:流体与等离子体
CiteScore
2.90
自引率
12.50%
发文量
110
审稿时长
4-8 weeks
期刊介绍: Aims and Scope of Contributions to Plasma Physics: Basic physics of low-temperature plasmas; Strongly correlated non-ideal plasmas; Dusty Plasmas; Plasma discharges - microplasmas, reactive, and atmospheric pressure plasmas; Plasma diagnostics; Plasma-surface interaction; Plasma technology; Plasma medicine.
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