通过水辅助聚焦电子束诱导蚀刻去除石墨烯--揭示剂量和停留时间对蚀刻曲线和二氧化硅基底地形变化的影响。

IF 2.6 4区 材料科学 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY
Beilstein Journal of Nanotechnology Pub Date : 2024-02-07 eCollection Date: 2024-01-01 DOI:10.3762/bjnano.15.18
Aleksandra Szkudlarek, Jan M Michalik, Inés Serrano-Esparza, Zdeněk Nováček, Veronika Novotná, Piotr Ozga, Czesław Kapusta, José María De Teresa
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引用次数: 0

摘要

石墨烯是研究最为广泛的二维材料之一,具有非凡的机械和电子特性。尽管发现石墨烯已有多年,但使用标准的抗蚀剂光刻技术来处理单层石墨烯仍然是一项挑战。最近的研究表明,利用所谓的聚焦电子束诱导刻蚀(FEBIE)技术,可以在水辅助工艺中直接刻蚀石墨烯,空间分辨率可达十纳米。采用这种方法,无需物理掩膜或抗蚀剂,只需一步即可实现石墨烯的纳米图案化,是一种非常吸引人的方法。在此过程中,在石墨烯纳米图案化的基础上,我们发现即使电子剂量值较低,二氧化硅基底也会发生显著的形态变化(2)。我们证明,石墨烯蚀刻和二氧化硅基底的形貌变化可以通过电子束参数(如停留时间和剂量)来控制。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Graphene removal by water-assisted focused electron-beam-induced etching - unveiling the dose and dwell time impact on the etch profile and topographical changes in SiO2 substrates.

Graphene is one of the most extensively studied 2D materials, exhibiting extraordinary mechanical and electronic properties. Although many years have passed since its discovery, manipulating single graphene layers is still challenging using standard resist-based lithography techniques. Recently, it has been shown that it is possible to etch graphene directly in water-assisted processes using the so-called focused electron-beam-induced etching (FEBIE), with a spatial resolution of ten nanometers. Nanopatterning graphene with such a method in one single step and without using a physical mask or resist is a very appealing approach. During the process, on top of graphene nanopatterning, we have found significant morphological changes induced in the SiO2 substrate even at low electron dose values (<8 nC/μm2). We demonstrate that graphene etching and topographical changes in SiO2 substrates can be controlled via electron beam parameters such as dwell time and dose.

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来源期刊
Beilstein Journal of Nanotechnology
Beilstein Journal of Nanotechnology NANOSCIENCE & NANOTECHNOLOGY-MATERIALS SCIENCE, MULTIDISCIPLINARY
CiteScore
5.70
自引率
3.20%
发文量
109
审稿时长
2 months
期刊介绍: The Beilstein Journal of Nanotechnology is an international, peer-reviewed, Open Access journal. It provides a unique platform for rapid publication without any charges (free for author and reader) – Platinum Open Access. The content is freely accessible 365 days a year to any user worldwide. Articles are available online immediately upon publication and are publicly archived in all major repositories. In addition, it provides a platform for publishing thematic issues (theme-based collections of articles) on topical issues in nanoscience and nanotechnology. The journal is published and completely funded by the Beilstein-Institut, a non-profit foundation located in Frankfurt am Main, Germany. The editor-in-chief is Professor Thomas Schimmel – Karlsruhe Institute of Technology. He is supported by more than 20 associate editors who are responsible for a particular subject area within the scope of the journal.
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