多孔阳极氧化铝的原位亚波长光学厚度控制。

IF 2.6 4区 材料科学 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY
Beilstein Journal of Nanotechnology Pub Date : 2024-01-31 eCollection Date: 2024-01-01 DOI:10.3762/bjnano.15.12
Aleksandrs Dutovs, Raimonds Popļausks, Oskars Putāns, Vladislavs Perkanuks, Aušrinė Jurkevičiūtė, Tomas Tamulevičius, Uldis Malinovskis, Iryna Olyshevets, Donats Erts, Juris Prikulis
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引用次数: 0

摘要

多孔阳极氧化铝(PAAO)有时也被称为纳米多孔阳极氧化铝,是许多科学和工程领域进行纳米加工的经济有效的模板。然而,由于阳极氧化初始阶段的过程控制存在困难,因此生产厚度精确到光学亚波长范围的超薄 PAAO 膜仍然具有挑战性。在本研究中,我们展示了一种可持续生产具有目标厚度的 PAAO 的技术。我们设计了一个带有光学窗口的电化学电池,用于在阳极氧化过程中对 PAAO 进行反射光谱分析。通过将光谱与转移矩阵模型进行实时拟合,可持续监测 PAAO 层的厚度增长。设计的自动化软件可在预设 PAAO 厚度值时终止阳极氧化过程。虽然这一概念是通过在 0.3 M 草酸电解液中以 40 V 的电位进行阳极氧化这一广泛使用的方法来说明的,但也可根据其他方案进行定制。使用单晶铝基底可以生产出有效厚度低于 300 纳米的 PAAO 层,精度可达几纳米。使用光谱椭偏仪证实了这一结果。这种在阳极氧化过程中控制厚度的方法无需对样品进行电子显微镜切片,对于小规模生产基于 PAAO 的功能性光学镀膜特别有价值。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
In situ optical sub-wavelength thickness control of porous anodic aluminum oxide.

Porous anodic aluminum oxide (PAAO), sometimes referred to as nanoporous anodic alumina, serves as a cost-effective template for nanofabrication in many fields of science and engineering. However, production of ultrathin PAAO membranes with precise thickness in the optical sub-wavelength range remains challenging because of difficulties regarding process control at the initial stage of anodic oxidation. In this study, we demonstrate a technique for consistently manufacturing PAAO with the targeted thickness. An electrochemical cell with an optical window was designed for reflectance spectroscopy of PAAO during anodization. Real-time fitting of spectra to a transfer-matrix model enabled continuous monitoring of the thickness growth of the PAAO layer. Automation software was designed to terminate the anodization process at preset PAAO thickness values. While the concept was illustrated using the widely used method of anodization in a 0.3 M oxalic acid electrolyte with a 40 V potential, it can be readily customized for other protocols. PAAO layers with effective thickness below 300 nm could be produced with a few nanometers accuracy using single-crystal aluminum substrates. The results were confirmed using spectroscopic ellipsometry. The method for controlling the thickness during anodization eliminates the necessity of sample sectioning for electron microscopy and is particularly valuable for the small-scale production of PAAO-based functional optical coatings.

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来源期刊
Beilstein Journal of Nanotechnology
Beilstein Journal of Nanotechnology NANOSCIENCE & NANOTECHNOLOGY-MATERIALS SCIENCE, MULTIDISCIPLINARY
CiteScore
5.70
自引率
3.20%
发文量
109
审稿时长
2 months
期刊介绍: The Beilstein Journal of Nanotechnology is an international, peer-reviewed, Open Access journal. It provides a unique platform for rapid publication without any charges (free for author and reader) – Platinum Open Access. The content is freely accessible 365 days a year to any user worldwide. Articles are available online immediately upon publication and are publicly archived in all major repositories. In addition, it provides a platform for publishing thematic issues (theme-based collections of articles) on topical issues in nanoscience and nanotechnology. The journal is published and completely funded by the Beilstein-Institut, a non-profit foundation located in Frankfurt am Main, Germany. The editor-in-chief is Professor Thomas Schimmel – Karlsruhe Institute of Technology. He is supported by more than 20 associate editors who are responsible for a particular subject area within the scope of the journal.
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