关于氮氧化物退火对具有原子尺度阶跃的 SiC(0001) 表面影响的密度泛函理论研究

IF 2.3 4区物理与天体物理 Q3 PHYSICS, APPLIED

Applied Physics Express Pub Date : 2024-01-19 DOI:10.35848/1882-0786/ad1bc3

Mitsuharu Uemoto, Nahoto Funaki, Kazuma Yokota, Takuji Hosoi and Tomoya Ono

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引用次数: 0

摘要

研究了氮氧化物退火对具有原子尺度阶梯的 4H-SiC(0001)/SiO2 界面电子结构的影响。导带边缘（CBE）态的特征行为受到 SiO2 原子构型和阶梯结构的强烈影响，导致 CBE 态在阶梯边缘不连续，从而阻止电子从源极穿透到漏极，降低了移动自由电子密度。我们发现 CBE 态的行为与二氧化硅的原子构型无关，并且在氮化退火后，不连续态的密度会降低。

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Density functional theory study on the effect of NO annealing for SiC(0001) surface with atomic-scale steps

The effect of NO annealing on the electronic structures of the 4H-SiC(0001)/SiO2 interface with atomic-scale steps is investigated. The characteristic behavior of conduction band edge (CBE) states is strongly affected by the atomic configurations in the SiO2 and the step structure, resulting in the discontinuity of the CBE states at the step edges, which prevents electrons from penetrating from the source to drain and decreases the mobile free-electron density. We found that the behavior of the CBE states becomes independent from the atomic configuration of the SiO2 and the density of the discontinuities is reduced after NO annealing.

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来源期刊

Applied Physics Express 物理-物理：应用

CiteScore

4.80

自引率

8.70%

发文量

310

审稿时长

1.2 months

期刊介绍： Applied Physics Express (APEX) is a letters journal devoted solely to rapid dissemination of up-to-date and concise reports on new findings in applied physics. The motto of APEX is high scientific quality and prompt publication. APEX is a sister journal of the Japanese Journal of Applied Physics (JJAP) and is published by IOP Publishing Ltd on behalf of the Japan Society of Applied Physics (JSAP).