高铝掺杂 4H-SiC 中的载流子重组:取决于注入条件

IF 1.5 4区 物理与天体物理 Q3 PHYSICS, APPLIED
Kazuhiro Tanaka, Masashi Kato
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引用次数: 0

摘要

我们研究了对功率器件至关重要的材料--重度掺铝(Al)对型 4H-SiC 中的载流子重组机制。掺铝 p 型 4H-SiC 中的载流子重组机制仍不清楚,有报告称存在多种可能性。为了深入了解这一问题,我们采用了光致发光 (PL) 测量方法,尤其是时间分辨光致发光 (TR-PL),因为这种方法非常适合研究重度掺铝 p 型 4H-SiC 中的载流子寿命。我们研究了 TR-PL 和 PL 光谱的温度和激发强度相关性,并讨论了潜在的重组机制。我们观察到,在铝浓度小于 1019 cm-3 的样品中,主要的重组机制随注入条件的变化而变化。在低注入条件下,通过铝受体水平的重组似乎占主导地位,表现出微弱的温度依赖性。然而,在高注入条件下,肖克利-雷德-霍尔(Shockley-Read-Hall)重组占主导地位,导致载流子寿命随温度升高而缩短。这种温度依赖性意味着存在空穴俘获势垒小的深层重组中心。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Carrier recombination in highly Al doped 4H-SiC: dependence on the injection conditions
We investigate carrier recombination mechanisms in heavily aluminum (Al) doped p-type 4H-SiC, a material crucial for power devices. The recombination mechanisms in Al-doped p-type 4H-SiC have remained unclear, with reports suggesting various possibilities. To gain insights, we employ photoluminescence (PL) measurements, particularly time-resolved PL (TR-PL), as they are well-suited for studying carrier lifetimes in heavily Al-doped p-type 4H-SiC. We examine the temperature and excitation intensity dependencies of TR-PL and PL spectra and discuss the underlying recombination mechanisms. We observe that the dominant recombination mechanism varies with injection conditions for the samples with Al concentration less than 1019 cm−3. Under low injection conditions, recombination via the Al acceptor level appears dominant, exhibiting weak temperature dependence. However, under high injection conditions, Shockley–Read–Hall recombination takes precedence, leading to shorter carrier lifetimes with increasing temperature. This temperature dependence implies that presences of the deep recombination centers with the small capture barrier for holes.
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来源期刊
Japanese Journal of Applied Physics
Japanese Journal of Applied Physics 物理-物理:应用
CiteScore
3.00
自引率
26.70%
发文量
818
审稿时长
3.5 months
期刊介绍: The Japanese Journal of Applied Physics (JJAP) is an international journal for the advancement and dissemination of knowledge in all fields of applied physics. JJAP is a sister journal of the Applied Physics Express (APEX) and is published by IOP Publishing Ltd on behalf of the Japan Society of Applied Physics (JSAP). JJAP publishes articles that significantly contribute to the advancements in the applications of physical principles as well as in the understanding of physics in view of particular applications in mind. Subjects covered by JJAP include the following fields: • Semiconductors, dielectrics, and organic materials • Photonics, quantum electronics, optics, and spectroscopy • Spintronics, superconductivity, and strongly correlated materials • Device physics including quantum information processing • Physics-based circuits and systems • Nanoscale science and technology • Crystal growth, surfaces, interfaces, thin films, and bulk materials • Plasmas, applied atomic and molecular physics, and applied nuclear physics • Device processing, fabrication and measurement technologies, and instrumentation • Cross-disciplinary areas such as bioelectronics/photonics, biosensing, environmental/energy technologies, and MEMS
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