D. Sharma, M. Tedaldi, Patrick Hole, A.D.L. Humphris, L. Wouters, T. Hantschel, U. Celano
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An Innovative Multi-Probe Tomographic Atomic Force Microscope for Materials Research and Failure Analysis
This article describes recent advancements in multi-probe sensing schemes and development of a tomographic atomic force microscopy tool for materials research and failure analysis.