电子显微镜中的电压对比：从奇异效应到调试现代集成电路

EDFA Technical Articles Pub Date : 2023-11-01 DOI:10.31399/asm.edfa.2023-4.p028

James Vickers, Blake Freeman, Neel Leslie

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引用次数: 0

摘要

扫描电子显微镜系统测量被测设备表面的电压对比度。本文讨论了扫描电子显微镜系统中依赖电压对比度（VC）测量的一组有限应用，展示了电压对比度测量如何探测现代有源集成电路上以高达 2 GHz 的速度运行的电气活动。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Voltage Contrast within Electron Microscopy: From a Curious Effect to Debugging Modern ICs

A scanning electron microscope system measures voltage contrast on device-under-test surfaces. This article addresses a limited set of applications that rely on voltage contrast (VC) measurements in SEM systems, showing how VC measurements can probe electrical activity running at speeds as high as 2 GHz on modern active integrated circuits.

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EDFA Technical Articles

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