高频压电环形谐振器的分析与测量

IF 2.3 4区物理与天体物理 Q3 PHYSICS, APPLIED

Applied Physics Express Pub Date : 2023-11-27 DOI:10.35848/1882-0786/ad1003

Tingting Yang, Yao Cai, Chao Gao, Qinwen Xu, Yang Zou, Yan Liu, Wenjuan Liu, Cheng Lei, Chengliang Sun

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引用次数: 0

摘要

本文介绍了一种压电环形谐振器，它由 Mo-ScAlN-Mo 夹层结构组成，并被塑造成一个中心中空的环形。通过模拟和理论分析阐明了谐振器的振动模式，并探讨了不同几何参数对谐振频率的影响。共振频率为 4.168 GHz 的高频谐振器已经制作完成。通过拟合修正巴特沃斯-范戴克（MBVD）等效电路模型和测量结果，提取了该谐振器的电气参数。这项工作为在单晶圆上设计频率可调的谐振器奠定了理论基础。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Analysis and measurement of high frequency piezoelectric ring resonator

This paper introduces a piezoelectric ring resonator, comprising a Mo-ScAlN-Mo sandwich structure and shaped into a ring with a hollow center. The vibrational modes of the resonator are elucidated through simulation and theoretical analysis, and the impact of diverse geometric parameters on the resonant frequency is explored. A high frequency resonator with a resonance frequency of 4.168 GHz has been fabricated. The electrical parameters of this resonator are extracted by fitting the Modified Butterworth-Van Dyke (MBVD) equivalent circuit model and the measured results. This work establishes a theoretical foundation for designing resonators with adjustable frequencies on a single wafer.

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来源期刊

Applied Physics Express 物理-物理：应用

CiteScore

4.80

自引率

8.70%

发文量

310

审稿时长

1.2 months

期刊介绍： Applied Physics Express (APEX) is a letters journal devoted solely to rapid dissemination of up-to-date and concise reports on new findings in applied physics. The motto of APEX is high scientific quality and prompt publication. APEX is a sister journal of the Japanese Journal of Applied Physics (JJAP) and is published by IOP Publishing Ltd on behalf of the Japan Society of Applied Physics (JSAP).