Feng Bu, Rui Feng, Shuwen Guo, Ming Zhou, Yiwang Wang, Feng Wang
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引用次数: 0
摘要
微机电系统陀螺仪的检测输出易受环境温度变化的影响而发生漂移。此外,驱动模式的振动幅度会受到信号拾取电路和结构参数的影响,从而对偏置和比例因子(SF)的温度漂移产生重大影响。本研究提出了一种基于谐波振幅边带比(SBR)的振动振幅控制方法,即 SBR-AGC,它利用振动电信号的谐波振幅比来表征振动振幅。通过闭环控制来抑制偏差和 SF 温度漂移,从而保持振动振幅的恒定性。蛛网状圆盘谐振器陀螺仪的实验结果表明,在 SBR-AGC 模式下,偏压的温度系数在 -20 至 60°C 范围内下降了 36%,而 SF 的温度系数在 -10 至 50°C 范围内下降了 49.7%。因此,陀螺仪的环境适应性得到了有效改善。
Temperature drift suppression for micro-electro-mechanical system gyroscope based on vibrational-displacement control with harmonic amplitude ratio
Micro-electro-mechanical system gyroscope detection output is susceptible to drift due to ambient temperature variations. Furthermore, the drive-mode vibration amplitude is affected by the signal pickup circuit and structural parameters, which significantly influence the temperature drift of the bias and scale factor (SF). This study proposes a vibration amplitude control method based on harmonic amplitude sideband-ratio (SBR), namely SBR-AGC, which characterizes the vibration amplitude using the harmonic amplitude ratio of the vibrational electrical signal. The constancy of vibration amplitude is maintained via closed-loop control to suppress bias and SF temperature drift. The experimental results on cobweb-like disk resonator gyroscope reveal that the temperature coefficient of bias in the SBR-AGC mode lies within −20 to 60°C and decreases by 36%, and the temperature coefficient of the SF lies within −10 to 50°C and decreases by 49.7%. Therefore, the environmental adaptability of the gyroscope is effectively improved.
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