基于等离子体光电探测器的近红外气体光谱仪应用于多种气体种类

IF 1.5 4区物理与天体物理 Q3 PHYSICS, APPLIED

Japanese Journal of Applied Physics Pub Date : 2023-12-18 DOI:10.35848/1347-4065/ad1699

Utana Yamaoka, Yuuki Kaneda, Masaaki Oshita, Shiro Saito, T. Kan

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引用次数: 0

摘要

我们提出了一种利用等离子光电探测器测量多种气体的近红外光谱系统。我们在硅衬底上形成了金衍射光栅，从而创建了一个等离子光电探测器，并在近红外区域进行了气体光谱测量。因此，我们可以测量浓度为 2% 的水蒸气的透射光谱。此外，我们还测量了 4.5% 和 2.7% 不同浓度下乙醇气体的透射率，以及透射率随浓度变化的情况。最后，我们还测量了 10% NH3 气体的透射光谱。由于这些结果与使用傅立叶变换红外光谱法进行的评估结果一致，因此证实了所提出的气体测量方法可应用于多种类型的气体传感。

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Near-infrared gas spectroscopy based on plasmonic photodetector applied for multiple gas species

We proposed a near-infrared spectroscopy system that measures multiple types of gases using a plasmonic photodetector. We formed a gold diffraction grating on a silicon substrate to create a plasmonic photodetector and conducted gas spectral measurements in the near-infrared region. As a result, we could measure the transmission spectrum of water vapor gas at a concentration of 2%. Furthermore, we could measure ethanol gas transmittance at different concentrations of 4.5% and 2.7%, and change in transmission depending on concentration. Lastly, the transmission spectrum of 10% NH3 gas was measured. Since these results are consistent with evaluations using Fourier Transform Infrared Spectroscopy, it was confirmed that the proposed gas measurement can be applied to multiple types of gas sensing.

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来源期刊

Japanese Journal of Applied Physics 物理-物理：应用

CiteScore

3.00

自引率

26.70%

发文量

818

审稿时长

3.5 months

期刊介绍： The Japanese Journal of Applied Physics (JJAP) is an international journal for the advancement and dissemination of knowledge in all fields of applied physics. JJAP is a sister journal of the Applied Physics Express (APEX) and is published by IOP Publishing Ltd on behalf of the Japan Society of Applied Physics (JSAP). JJAP publishes articles that significantly contribute to the advancements in the applications of physical principles as well as in the understanding of physics in view of particular applications in mind. Subjects covered by JJAP include the following fields: • Semiconductors, dielectrics, and organic materials • Photonics, quantum electronics, optics, and spectroscopy • Spintronics, superconductivity, and strongly correlated materials • Device physics including quantum information processing • Physics-based circuits and systems • Nanoscale science and technology • Crystal growth, surfaces, interfaces, thin films, and bulk materials • Plasmas, applied atomic and molecular physics, and applied nuclear physics • Device processing, fabrication and measurement technologies, and instrumentation • Cross-disciplinary areas such as bioelectronics/photonics, biosensing, environmental/energy technologies, and MEMS