Jin Miura, F. Inamura, T. Ikuta, K. Maehashi, Kenji Ikushima
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引用次数: 0
摘要
通过石墨烯传输观察了二氧化硅/硅界面上光诱导载流子的积累。化学气相沉积石墨烯被转移到带有二氧化硅介电层的轻度 p 掺杂硅衬底上,并用作电荷传感器来检测二氧化硅/硅界面上光诱导载流子的积累。将样品冷却到 4.2 K 以实现无本征载流子的未掺杂硅衬底。未掺杂硅衬底中的光激发载流子通过栅极电压被收集到二氧化硅/硅界面上,载流子极性由光照时设置的栅极电压极性控制。光诱导载流子密度由入射到硅衬底上的光子数量决定,光子-电子转换效率约为 0.036。这些结果可为标准硅-MOS 结构中的传导沟道(n 型或 p 型)提供极性控制,从而为光可编程硅-CMOS 铺平道路。
Accumulation of photoinduced carriers at the SiO2/Si interface observed through graphene transport
The accumulation of photoinduced carriers at the SiO2/Si interface was observed via graphene transport. Chemical vapor deposition graphene was transferred to a lightly p-doped silicon substrate with a SiO2 dielectric layer and served as a charge sensor for detecting the accumulation of photoinduced carriers at the SiO2/Si interface. The sample was cooled to 4.2 K to realize an undoped silicon substrate without intrinsic carriers. Photoexcited carriers in the undoped silicon substrate were collected at the SiO2/Si interface via a gate voltage and the carrier polarity was controlled well by the polarity of the gate voltage set during the light illumination. The photoinduced carrier density was determined by the number of photons incident on the silicon substrate with a photon-electron conversion efficiency of about 0.036. These results may provide polarity control of the conduction channel (n- or p-type) in standard Si-MOS structures, paving the way for optically programmable Si-CMOS.
期刊介绍:
The Japanese Journal of Applied Physics (JJAP) is an international journal for the advancement and dissemination of knowledge in all fields of applied physics. JJAP is a sister journal of the Applied Physics Express (APEX) and is published by IOP Publishing Ltd on behalf of the Japan Society of Applied Physics (JSAP).
JJAP publishes articles that significantly contribute to the advancements in the applications of physical principles as well as in the understanding of physics in view of particular applications in mind. Subjects covered by JJAP include the following fields:
• Semiconductors, dielectrics, and organic materials
• Photonics, quantum electronics, optics, and spectroscopy
• Spintronics, superconductivity, and strongly correlated materials
• Device physics including quantum information processing
• Physics-based circuits and systems
• Nanoscale science and technology
• Crystal growth, surfaces, interfaces, thin films, and bulk materials
• Plasmas, applied atomic and molecular physics, and applied nuclear physics
• Device processing, fabrication and measurement technologies, and instrumentation
• Cross-disciplinary areas such as bioelectronics/photonics, biosensing, environmental/energy technologies, and MEMS