{"title":"利用沟道堆叠工程优化三栅极无结 FinFET 的性能,用于数字和模拟/射频设计","authors":"Devenderpal Singh, Shalini Chaudhary, Basudha Dewan, Menka Yadav","doi":"10.1088/1674-4926/44/11/114103","DOIUrl":null,"url":null,"abstract":"This manuscript explores the behavior of a junctionless tri-gate FinFET at the nano-scale region using SiGe material for the channel. For the analysis, three different channel structures are used: (a) tri-layer stack channel (TLSC) (Si–SiGe–Si), (b) double layer stack channel (DLSC) (SiGe–Si), (c) single layer channel (SLC) (Si). The <italic toggle=\"yes\">I</italic>−<italic toggle=\"yes\">V</italic> characteristics, subthreshold swing (SS), drain-induced barrier lowering (DIBL), threshold voltage (<italic toggle=\"yes\">V</italic>\n<sub>t</sub>), drain current (<italic toggle=\"yes\">I</italic>\n<sub>ON</sub>), OFF current (<italic toggle=\"yes\">I</italic>\n<sub>OFF</sub>), and ON-OFF current ratio (<italic toggle=\"yes\">I</italic>\n<sub>ON</sub>/<italic toggle=\"yes\">I</italic>\n<sub>OFF</sub>) are observed for the structures at a 20 nm gate length. It is seen that TLSC provides 21.3% and 14.3% more ON current than DLSC and SLC, respectively. The paper also explores the analog and RF factors such as input transconductance (<italic toggle=\"yes\">g</italic>\n<sub>m</sub>), output transconductance (<italic toggle=\"yes\">g</italic>\n<sub>ds</sub>), gain (<italic toggle=\"yes\">g</italic>\n<sub>m</sub>/<italic toggle=\"yes\">g</italic>\n<sub>ds</sub>), transconductance generation factor (TGF), cut-off frequency (<italic toggle=\"yes\">f</italic>\n<sub>T</sub>), maximum oscillation frequency (<italic toggle=\"yes\">f</italic>\n<sub>max</sub>), gain frequency product (GFP) and linearity performance parameters such as second and third-order harmonics (<italic toggle=\"yes\">g</italic>\n<sub>m2</sub>, <italic toggle=\"yes\">g</italic>\n<sub>m3</sub>), voltage intercept points (VIP<sub>2</sub>, VIP<sub>3</sub>) and 1-dB compression points for the three structures. The results show that the TLSC has a high analog performance due to more <italic toggle=\"yes\">g</italic>\n<sub>m</sub> and provides 16.3%, 48.4% more gain than SLC and DLSC, respectively and it also provides better linearity. All the results are obtained using the VisualTCAD tool.","PeriodicalId":17038,"journal":{"name":"Journal of Semiconductors","volume":"59 1","pages":""},"PeriodicalIF":4.8000,"publicationDate":"2023-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Performance optimization of tri-gate junctionless FinFET using channel stack engineering for digital and analog/RF design\",\"authors\":\"Devenderpal Singh, Shalini Chaudhary, Basudha Dewan, Menka Yadav\",\"doi\":\"10.1088/1674-4926/44/11/114103\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This manuscript explores the behavior of a junctionless tri-gate FinFET at the nano-scale region using SiGe material for the channel. For the analysis, three different channel structures are used: (a) tri-layer stack channel (TLSC) (Si–SiGe–Si), (b) double layer stack channel (DLSC) (SiGe–Si), (c) single layer channel (SLC) (Si). The <italic toggle=\\\"yes\\\">I</italic>−<italic toggle=\\\"yes\\\">V</italic> characteristics, subthreshold swing (SS), drain-induced barrier lowering (DIBL), threshold voltage (<italic toggle=\\\"yes\\\">V</italic>\\n<sub>t</sub>), drain current (<italic toggle=\\\"yes\\\">I</italic>\\n<sub>ON</sub>), OFF current (<italic toggle=\\\"yes\\\">I</italic>\\n<sub>OFF</sub>), and ON-OFF current ratio (<italic toggle=\\\"yes\\\">I</italic>\\n<sub>ON</sub>/<italic toggle=\\\"yes\\\">I</italic>\\n<sub>OFF</sub>) are observed for the structures at a 20 nm gate length. It is seen that TLSC provides 21.3% and 14.3% more ON current than DLSC and SLC, respectively. The paper also explores the analog and RF factors such as input transconductance (<italic toggle=\\\"yes\\\">g</italic>\\n<sub>m</sub>), output transconductance (<italic toggle=\\\"yes\\\">g</italic>\\n<sub>ds</sub>), gain (<italic toggle=\\\"yes\\\">g</italic>\\n<sub>m</sub>/<italic toggle=\\\"yes\\\">g</italic>\\n<sub>ds</sub>), transconductance generation factor (TGF), cut-off frequency (<italic toggle=\\\"yes\\\">f</italic>\\n<sub>T</sub>), maximum oscillation frequency (<italic toggle=\\\"yes\\\">f</italic>\\n<sub>max</sub>), gain frequency product (GFP) and linearity performance parameters such as second and third-order harmonics (<italic toggle=\\\"yes\\\">g</italic>\\n<sub>m2</sub>, <italic toggle=\\\"yes\\\">g</italic>\\n<sub>m3</sub>), voltage intercept points (VIP<sub>2</sub>, VIP<sub>3</sub>) and 1-dB compression points for the three structures. The results show that the TLSC has a high analog performance due to more <italic toggle=\\\"yes\\\">g</italic>\\n<sub>m</sub> and provides 16.3%, 48.4% more gain than SLC and DLSC, respectively and it also provides better linearity. All the results are obtained using the VisualTCAD tool.\",\"PeriodicalId\":17038,\"journal\":{\"name\":\"Journal of Semiconductors\",\"volume\":\"59 1\",\"pages\":\"\"},\"PeriodicalIF\":4.8000,\"publicationDate\":\"2023-11-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Semiconductors\",\"FirstCategoryId\":\"101\",\"ListUrlMain\":\"https://doi.org/10.1088/1674-4926/44/11/114103\",\"RegionNum\":4,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"PHYSICS, CONDENSED MATTER\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Semiconductors","FirstCategoryId":"101","ListUrlMain":"https://doi.org/10.1088/1674-4926/44/11/114103","RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"PHYSICS, CONDENSED MATTER","Score":null,"Total":0}
Performance optimization of tri-gate junctionless FinFET using channel stack engineering for digital and analog/RF design
This manuscript explores the behavior of a junctionless tri-gate FinFET at the nano-scale region using SiGe material for the channel. For the analysis, three different channel structures are used: (a) tri-layer stack channel (TLSC) (Si–SiGe–Si), (b) double layer stack channel (DLSC) (SiGe–Si), (c) single layer channel (SLC) (Si). The I−V characteristics, subthreshold swing (SS), drain-induced barrier lowering (DIBL), threshold voltage (Vt), drain current (ION), OFF current (IOFF), and ON-OFF current ratio (ION/IOFF) are observed for the structures at a 20 nm gate length. It is seen that TLSC provides 21.3% and 14.3% more ON current than DLSC and SLC, respectively. The paper also explores the analog and RF factors such as input transconductance (gm), output transconductance (gds), gain (gm/gds), transconductance generation factor (TGF), cut-off frequency (fT), maximum oscillation frequency (fmax), gain frequency product (GFP) and linearity performance parameters such as second and third-order harmonics (gm2, gm3), voltage intercept points (VIP2, VIP3) and 1-dB compression points for the three structures. The results show that the TLSC has a high analog performance due to more gm and provides 16.3%, 48.4% more gain than SLC and DLSC, respectively and it also provides better linearity. All the results are obtained using the VisualTCAD tool.