直流溅射沉积具有改进疏水性和降低表面能的金属陶瓷 Ti3SiC2 薄膜

Q4 Multidisciplinary
H. M. Barra, Henry Ramos
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引用次数: 0

摘要

金属陶瓷化合物,如Ti3SiC2,是结合金属和陶瓷特性的创新材料。然而,大多数用于合成这些材料的方法都需要较高的沉积温度。因此,在这项工作中,制备了Ti3SiC2薄膜,并使用磁化片等离子体源在不加热或偏置的情况下将其沉积在钢样品上。用Ar等离子体溅射钛、硅和石墨靶材,沉积时间分别为60min、90min和120min。样品的能量色散x射线(EDX)和x射线衍射(XRD)扫描证实了所需化合物的合成。此外,通过接触角测量计算了涂层基板的润湿性和表面能。结果表明,随着沉积时间的延长,涂层基底的疏水性增强。事实上,这些发现表明,Ti3SiC2沉积的钢基体具有增强的疏水性,是一种潜在的工业工具自清洁涂层。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Direct Current Sputtering Deposition of the Metallic Ceramic Ti3SiC2 Thin Film with Improved Hydrophobicity and Reduced Surface Energy
Metallic ceramic compounds, such as Ti3SiC2, are innovative materials that combine the properties of metals and ceramics. However, most methods used in synthesizing these materials employ high deposition temperatures. Hence, in this work, Ti3SiC2 thin film was prepared and deposited on a steel sample without heating or biasing using a magnetized sheet plasma source. The synthesis was carried out by sputtering titanium, silicon, and graphite targets with Ar plasma at different deposition times of 60, 90, and 120 minutes. Energy dispersive X-ray (EDX) and X-ray diffraction (XRD) scans of the samples confirmed the synthesis of the desired compound. Moreover, the wettability and surface energy properties of the coated substrate were calculated by contact angle measurements. Results showed that as the deposition time increased, the coated substrate became more hydrophobic. Indeed, these findings show that Ti3SiC2 deposited steel substrate, with its increased hydrophobicity, is a potential self-cleaning coating for industrial tools.
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来源期刊
CiteScore
0.70
自引率
0.00%
发文量
19
审稿时长
8 weeks
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