大尺寸高纯度硅玻璃合成的下垂工艺建模与优化

IF 2.1 3区 材料科学 Q2 MATERIALS SCIENCE, CERAMICS
Chengshuai Li, Suping Yin, Qianli Ma, Haisheng Fang
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引用次数: 0

摘要

玻璃下垂是CVD工艺的后续工艺,用于大尺寸和高纯度硅玻璃的合成。在这个过程中发生的物理现象是复杂的,需要深入了解才能更好地控制。本文采用水平集和焓-孔隙度耦合模型对沉降过程进行了全面的研究。利用该模型可以很好地预测钢锭的变形行为和氢氧根均匀分布区的演变。然后,根据不同的应用,提出了有效成品率和氢氧均匀区最大延伸半径两个性能指标,并探讨了几何参数(钢锭初始长度、坩埚直径和底座高度)和运行参数(加热器功率分配方案)等重要因素对这两个指标的影响。采用正交试验设计方法进一步确定四因素的集体效应。极差分析结果表明,初始锭长对有效屈服率的影响最大,坩埚直径对有效屈服率的影响最小;对于最大延伸半径,坩埚直径是主要影响因素,而基座高度是最不敏感的因素。最后对这两个指标提出了相应的优化方案,为改善下垂过程提供了有益的指导。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Modeling and optimization of the sagging process for large-size and high-purity silica glass synthesis

Glass sagging is a subsequent process to the CVD process used for large-size and high-purity silica glass synthesis. Physical phenomena taking place in this process are complicated which need an in-depth understanding for better control. In this paper, a comprehensive study is conducted for the sagging process using a level-set and enthalpy-porosity coupled model. With this model, the deforming behavior of glass ingot and evolution of OH uniformly distributed region are well predicted. Then, two performance indices (the effective yield rate and maximum extension radius of OH uniformly distributed region) are proposed based on different applications, and important factors, including geometrical parameters (the ingot initial length, crucible diameter and pedestal height) and operating parameter (the heater power allocation scheme), are explored for their effects on the two indices. The orthogonal test design method is adopted to further determine the collective effects of the four factors. According to the range analysis results, the initial ingot length has the greatest effect, while the crucible diameter has the least effect on the effective yield rate; and for the maximum extension radius, the crucible diameter becomes the major factor, while the pedestal height is the most insensitive factor. The corresponding optimal schemes are proposed for the two indices finally, which are believed to provide useful guidance for improving the sagging process.

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来源期刊
International Journal of Applied Glass Science
International Journal of Applied Glass Science MATERIALS SCIENCE, CERAMICS-
CiteScore
4.50
自引率
9.50%
发文量
73
审稿时长
>12 weeks
期刊介绍: The International Journal of Applied Glass Science (IJAGS) endeavors to be an indispensable source of information dealing with the application of glass science and engineering across the entire materials spectrum. Through the solicitation, editing, and publishing of cutting-edge peer-reviewed papers, IJAGS will be a highly respected and enduring chronicle of major advances in applied glass science throughout this century. It will be of critical value to the work of scientists, engineers, educators, students, and organizations involved in the research, manufacture and utilization of the material glass. Guided by an International Advisory Board, IJAGS will focus on topical issue themes that broadly encompass the advanced description, application, modeling, manufacture, and experimental investigation of glass.
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