{"title":"自润滑机床防护涂层氮化钨薄膜的合成与表征","authors":"Sri Bharani Ghantasala, Sumitra Sharma","doi":"10.1080/00202967.2023.2271712","DOIUrl":null,"url":null,"abstract":"WN thin films were synthesised on silicon (100) substrate by varying the nitrogen flow rate (NFR) at a substrate temperature of 300°C for the initial 15 min using RF magnetron sputtering. With the ...","PeriodicalId":23251,"journal":{"name":"Transactions of the IMF","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2023-11-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Synthesis and characterisation of self-lubricating tungsten nitride thin films as protective machine tool coatings\",\"authors\":\"Sri Bharani Ghantasala, Sumitra Sharma\",\"doi\":\"10.1080/00202967.2023.2271712\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"WN thin films were synthesised on silicon (100) substrate by varying the nitrogen flow rate (NFR) at a substrate temperature of 300°C for the initial 15 min using RF magnetron sputtering. With the ...\",\"PeriodicalId\":23251,\"journal\":{\"name\":\"Transactions of the IMF\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2023-11-22\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Transactions of the IMF\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1080/00202967.2023.2271712\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Transactions of the IMF","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1080/00202967.2023.2271712","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Synthesis and characterisation of self-lubricating tungsten nitride thin films as protective machine tool coatings
WN thin films were synthesised on silicon (100) substrate by varying the nitrogen flow rate (NFR) at a substrate temperature of 300°C for the initial 15 min using RF magnetron sputtering. With the ...
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