HAXPES:表征纳米结构材料的非弹性背景

IF 1.6 4区化学 Q4 CHEMISTRY, PHYSICAL

Surface and Interface Analysis Pub Date : 2023-11-28 DOI:10.1002/sia.7273

Sven Tougaard

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引用次数: 0

摘要

几十年来，XPS中非弹性散射电子的光谱分析一直被用于确定纳米尺度上材料的结构。利用HAXPES中可用的更高光子能量，该方法最近被证明可以相当准确地确定结构，探测深度超过100纳米。本文就HAXPES的应用作一综述。分析只需要两个参数，即非弹性平均自由程和非弹性电子散射截面。我们还详细讨论了如何最好地选择这些参数。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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HAXPES: Inelastic background for characterization of nanostructured materials

Analysis of the spectrum of inelastically scattered electrons in XPS has been used for decades to determine the structure of materials on the nanoscale. Using the higher photon energies available in HAXPES, the method was recently shown to determine structures rather accurately with a more than 100 nm probing depth. In this paper, these HAXPES applications are briefly reviewed. Only two parameters are required for the analysis, namely, the inelastic mean free path and the cross section for inelastic electron scattering. We also discuss in detail how these parameters are best selected.

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来源期刊

Surface and Interface Analysis 化学-物理化学

CiteScore

3.30

自引率

5.90%

发文量

130

审稿时长

4.4 months

期刊介绍： Surface and Interface Analysis is devoted to the publication of papers dealing with the development and application of techniques for the characterization of surfaces, interfaces and thin films. Papers dealing with standardization and quantification are particularly welcome, and also those which deal with the application of these techniques to industrial problems. Papers dealing with the purely theoretical aspects of the technique will also be considered. Review articles will be published; prior consultation with one of the Editors is advised in these cases. Papers must clearly be of scientific value in the field and will be submitted to two independent referees. Contributions must be in English and must not have been published elsewhere, and authors must agree not to communicate the same material for publication to any other journal. Authors are invited to submit their papers for publication to John Watts (UK only), Jose Sanz (Rest of Europe), John T. Grant (all non-European countries, except Japan) or R. Shimizu (Japan only).