Atomic layer deposition in the design of functional materials for sensing/removing toxic gases

Toxic gases including volatile organic compounds (VOCs), industrial inorganic gases (H₂S, NO_x, SO_x, etc.) and pesticides show great harm to the environment and high risk to human health. Effective nanomaterials play a key role in real-time sensitive identification of the concentration of toxic gases and removing the toxic gases. Atomic layer deposition has emerged as a powerful and precise technique to design effective nanomaterials for sensing and removing toxic gases. Therefore, in this review, we first present the sensing mechanism and removing mechanism of nanomaterials to understand the structure–performance relationship. Then, we review the application of state-of-the-art ALD in the design and fabrication of high sensing and removing materials in recent years. Finally, we provide perspectives and opportunities about the design of effective materials and directions of ALD for sensing/removing toxic gases in the future.