封面图片来自C. Loho和同事(化学。Vap。沉积，2014,20,152)

Chemical Vapor Deposition Pub Date : 2014-06-05 DOI:10.1002/cvde.201474561

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引用次数: 0

摘要

封面图像显示了co2激光闪蒸金属β-二酮酸前体，它们的分解，以及随后LiCoO2薄膜的生长。在CVD工艺中使用co2激光闪蒸是一种提供低挥发性固体前驱体的新方法。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

Cover image from C. Loho and co-workers (Chem. Vap. Deposition 2014, 20, 152)

查看原文本刊更多论文

Cover image from C. Loho and co-workers (Chem. Vap. Deposition 2014, 20, 152)

The cover image illustrates CO₂-laser flash evaporation of metal β-diketonate precursors, their decomposition, and the subsequent growth of a LiCoO₂ thin film. The use of CO₂-laser flash evaporation in a CVD process is a novel approach for the delivery of solid precursors with low volatility.

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来源期刊

Chemical Vapor Deposition 工程技术-材料科学：膜

自引率

0.00%

发文量

审稿时长

>12 weeks

期刊介绍： Chemical Vapor Deposition (CVD) publishes Reviews, Short Communications, and Full Papers on all aspects of chemical vapor deposition and related technologies, along with other articles presenting opinion, news, conference information, and book reviews. All papers are peer-reviewed. The journal provides a unified forum for chemists, physicists, and engineers whose publications on chemical vapor deposition have in the past been spread over journals covering inorganic chemistry, materials chemistry, organometallics, applied physics and semiconductor technology, thin films, and ceramic processing.