近场合成孔径聚焦技术提高多层HBM扫描声显微镜检测能力

Mario Wolf, Bugra Birki, Peter Hoffrogge, Peter Czurratis, Chaitanya Bakre, Mario Pacheco, Deepak Goyal
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引用次数: 0

摘要

摘要研究了利用扫描声学显微镜(SAM)增强检测高带宽存储器(HBM)堆栈的方法。由于多层结构非常复杂,因此采用了复杂的信号处理方法。为了提高检测能力和缩短检测时间,采用了合成孔径聚焦技术(SAFT)。与之前在地对空导弹数据上应用SAFT的试验相比,这次的贡献引入了近场SAFT。在换能器的近场中,还对换能器与其焦点之间的层进行了重建。这种方法允许在普通工作距离下进行测量,提供更高的频率和更高的分辨率。为了确定最优的测量设置,对不同中心频率和焦距的各种测量设置和传感器进行了系统的评估。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Near-Field Synthetic Aperture Focusing Technique to Enhance the Inspection Capability of Multi-Layer HBM Stacks in Scanning Acoustic Microscopy
Abstract This paper investigates the enhanced inspection of High Bandwidth Memory (HBM) stacks using Scanning Acoustic Microscopy (SAM). As the multi-layer structure is quite complex, sophisticated signal processing methods are employed. To improve detection capabilities and inspection time, the Synthetic Aperture Focusing Technique (SAFT) is utilized. In contrast to previous trials applying SAFT on SAM data, this contribution introduces Near Field SAFT. Reconstruction is also performed for layers between the transducer and its focus, in the near field of the transducer. This approach allows for measurements with common working distances, providing higher frequencies and improved resolution. Systematic evaluations are conducted on various measurement setups and transducers with different center frequencies and focal lengths in order to determine the most optimal measurement setup.
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