Sam Subramanian, Khiem Ly, Jacob Levenson, Tony Chrastecky
{"title":"半导体失效分析的透射电镜技术","authors":"Sam Subramanian, Khiem Ly, Jacob Levenson, Tony Chrastecky","doi":"10.31399/asm.cp.istfa2023tpk1","DOIUrl":null,"url":null,"abstract":"Abstract Presentation slides for the ISTFA 2023 Tutorial session “TEM Techniques for Semiconductor Failure Analysis.”","PeriodicalId":20443,"journal":{"name":"Proceedings","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2023-11-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"TEM Techniques for Semiconductor Failure Analysis\",\"authors\":\"Sam Subramanian, Khiem Ly, Jacob Levenson, Tony Chrastecky\",\"doi\":\"10.31399/asm.cp.istfa2023tpk1\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Abstract Presentation slides for the ISTFA 2023 Tutorial session “TEM Techniques for Semiconductor Failure Analysis.”\",\"PeriodicalId\":20443,\"journal\":{\"name\":\"Proceedings\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2023-11-12\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.31399/asm.cp.istfa2023tpk1\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.31399/asm.cp.istfa2023tpk1","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}