低温fib制备TEM样品过程中温度对光刻胶形貌的影响

Ji Hye Hyun, Youngjin Cho, Hyoungsic Cho, Seojin Kim, In Chang Choi, Beomjun Kim, Yoonhae Kim, Christopher H. Kang
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引用次数: 0

摘要

摘要利用聚焦离子束扫描电子显微镜(FIB-SEM)制备典型的透射电子显微镜(TEM)样品时,光刻胶(PR)的轮廓容易发生变形和收缩。在TEM样品制备过程中,随着温度的升高,PR剖面会发生变形和收缩。在本研究中,我们分析了在低温下使用冷冻fib进行样品制备时的影响,以尽量减少变形和收缩问题。为了验证该方法,在不同条件下进行了TEM样品制备过程。从这些实验中可以看出,在全低温条件下的TEM结果表明,PR线间距比最接近目标,即样品的实际线间距比(1:1),并且底部抗反射涂层(BARC)收缩最小。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
The Influence of Temperature on Photoresist Profiles during TEM Sample Preparation using Cryo-FIB
Abstract Photoresist (PR) profiles tend to have deformation and shrinkage with typical transmission electron microscopy (TEM) sample preparation methods using a focused ion beam scanning electron microscope (FIB-SEM). As the temperature increases during the TEM sample preparation, it may lead to deformation and shrinkage in PR profiles. In this study, we analyze the impact when performing the sample preparation at a cold temperature using a cryo-FIB to minimize deformation and shrinkage issues. To test this methodology, the TEM sample preparation process was performed under different conditions. From these experiments, the TEM results with full cryo conditions showed that the PR line to space ratio was closest to the target, which is the sample’s real line to space ratio (1:1), and the bottom anti-reflective coating (BARC) shrinkage was minimized.
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