PFA采样的模滤波自动算法

Proceedings Pub Date : 2023-11-12 DOI:10.31399/asm.cp.istfa2023p0253

Yougui Liao, Marsela Pontoh, Tyler Lenzi

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引用次数: 0

摘要

本课题的目标是开发一种自动化的模具过滤算法，以减少PFA工程师在PFA提交前审查和确认的模具数量。这可以减少PFA工程师的工作量，使PFA工程师可以将他们的调查集中在少数晶圆和模具上，从而使PFA作业提交更加高效和准确。PFA取样模具的数量、类型和位置可以按照PFA工程师设定的规则自动给出。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Automated Algorithm of Die Filter for PFA Sampling

Abstract The goal of this project is to develop an automated algorithm of die filter to minimize the number of dies for PFA engineers to review and to confirm before PFA submission. This can reduce the workload of PFA engineers so that the PFA engineers can focus their investigations on few wafers and dies and thus the PFA job submission can be more efficient and accurate. The number, type, and location of dies for PFA sampling can be automatically given by following the rules set by PFA engineers.

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Proceedings

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0.00%

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审稿时长

11 weeks